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1999, vol.66, no.1	1999, vol.66, no.10	1999, vol.66, no.11	1999, vol.66, no.12	1999, vol.66, no.2	1999, vol.66, no.3
1999, vol.66, no.4	1999, vol.66, no.5	1999, vol.66, no.6	1999, vol.66, no.7-8	1999, vol.66, no.9

题名	作者	出版年	年卷期
3D probe for dimensional metrology on microsystem components	Thomas Kleine-Besten; Stefan Loheide; Uwe Brand; Andreas Schlachetzki; Sebastian Butefisch; Stephanus Buttgenbach	1999	1999, vol.66, no.12
Development of a 3D-laserinterferometric nano-measuring-system for Abbe-error-free fitting into scanning force microscopes	H. Buchner; G. Jager; U. Gerhardt; K. Hasche	1999	1999, vol.66, no.12
Measurement of indenters with a scanning force microscope	K. Herrmann; K. Hasche; R. Seemann	1999	1999, vol.66, no.12
Micro electro-mechanical systems (MEMS) in precision engineering	Hans-Heinrich Gatzen	1999	1999, vol.66, no.12
Opto-tactile sensor for 2D-and 3D measurement of small structures on coordinate-measuring machines	Heinrich Schwenke; Christian Weiskirch; Horst Kunzmann	1999	1999, vol.66, no.12
Traceable and precise depth setting standards for measurement ranges from 1μm to 1mm	U. Brand; G. Hinzmann; H. Schnadelbach; C. Feist; P. Stuht; R. Kruger-sehm; V. Jager	1999	1999, vol.66, no.12