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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
2006
2007
2008
2009
2010
2011
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2018
2019
2020
2021
2022
2023
2024
2025
2010, vol.20, no.1
2010, vol.20, no.10
2010, vol.20, no.11
2010, vol.20, no.12
2010, vol.20, no.2
2010, vol.20, no.3
2010, vol.20, no.4
2010, vol.20, no.5
2010, vol.20, no.6
2010, vol.20, no.7
2010, vol.20, no.8
2010, vol.20, no.9
题名
作者
出版年
年卷期
Deep reactive ion etching of fused silica using a single-coated soft mask layer for bio-analytical applications
Tathagata Ray; Haixin Zhu; Deirdre R. Meldrum
2010
2010, vol.20, no.9
GaAs/AlAs/InGaP heterostructure: a versatile material basis for cantilever designs
Dagmar Gregusova; Robert Kudela; Peter Elias; Jan Soltys; Ivan Kostic; Vladimir Cambel
2010
2010, vol.20, no.9
Novel device for calibration-free flow rate measurements in micro gas chromatographic systems
B. C. Kaanta; H. Chen; X. Zhang
2010
2010, vol.20, no.9
A planar PDMS micropump using in-contact minimized-leakage check valves
Junhui Ni; Fengliang Huang; Bin Wang; Beizhi Li; Qiao Lin
2010
2010, vol.20, no.9
Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator
M. J. Prest; Y. Wang; F. Huang; M. J. Lancaster
2010
2010, vol.20, no.9
Fabrication of nanoscale electrostatic lenses
I. Sinno; A. Sanz-Velasco; S. Kang; H. Jansen; E. Olsson; P. Enoksson; K. Svensson
2010
2010, vol.20, no.9
Investigations into the flame stability limits in a backward step micro scale combustor with premixed methane-air mixtures
Bhupendra Khandelwal; Gur Partap Singh Sahota; Sudarshan Kumar
2010
2010, vol.20, no.9
Improvement of the poly-SiGe electrode contact technology for MEMS
G. Claes; S. Severi; J.-P. Celis; A. Witvrouw
2010
2010, vol.20, no.9
Low-cost carbon thick-film strain sensors for implantable applications
Christian A. Gutierrez; Ellis Meng
2010
2010, vol.20, no.9
Multi-band radio-frequency filters fabricated using polyimide-based membrane transfer bonding technology
Takeshi Matsumura; Masayoshi Esashi; Hiroshi Harada; Shuji Tanaka
2010
2010, vol.20, no.9
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