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期刊
ISSN
0913-5685
刊名
電子情報通信学会技術研究報告
参考译名
电子信息通信学会技术研究报告:电子装置
收藏年代
2000~2024
关联期刊
参考译名
收藏年代
電子情報通信学会技術研究報告
电子信息通信学会技术研究报告:电子装置
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2000, vol.100, no.1
2000, vol.100, no.147
2000, vol.100, no.148
2000, vol.100, no.149
2000, vol.100, no.2
2000, vol.100, no.235
2000, vol.100, no.236
2000, vol.100, no.265
2000, vol.100, no.266
2000, vol.100, no.305
2000, vol.100, no.306
2000, vol.100, no.318
2000, vol.100, no.370
2000, vol.100, no.405
2000, vol.100, no.406
2000, vol.100, no.505
2000, vol.100, no.506
2000, vol.100, no.547
2000, vol.100, no.548
2000, vol.100, no.549
2000, vol.100, no.57
2000, vol.100, no.58
2000, vol.100, no.641
2000, vol.100, no.642
2000, vol.100, no.683
题名
作者
出版年
年卷期
A study on the characteristics of high performance self-aligned asymmetric structure (SAAS)
Chang-Soon Choi; Kyung-Whan Kim; Woo-Young Choi
2000
2000, vol.100, no.147
Excimer laser annealing for 0.1μm MOSFETs
Takashi Noguchi; Michitaka Kubota; Hiroshi Yamamoto; Kouichi Matsumoto; Machio Yamagishi
2000
2000, vol.100, no.147
Analysis of a high performance self-aligned elevated source drain MOSFET with reduced gate-induced drain-leakage
Kyung-Whan Kim; Chang-Soon Choi; Woo-Young Choi
2000
2000, vol.100, no.147
New process technologies for copper/low-k metallization - abrasive-free copper CMP (AFP) and new low-k material: methyl-silicon-oxycarbide (MTES)
Kenji Hinode; Sei-ichi Kondo; Takeshi Furusawa; Noriyuki Sakuma; Daisuke Ryzaki; Ken-ichi Takeka; Shun-taro Machida; Yasushi Goto; Hizuru Yamaguchi; Yoshio Homma
2000
2000, vol.100, no.147
Sub 4-nm polyoxide using ECR (electron cyclotron resonance) N{sub}2O plasma oxidation
Sangyeon Han; Hyungcheol Shin
2000
2000, vol.100, no.147
Low-temperature formation of ultra-thin SiO{sub}2 films using oxygen radicals and the application for MOSFET gate insulator
M. Kanehiro; Y. Ueda; T. Kimoto; H. Matsunami
2000
2000, vol.100, no.147
Oxidation behaviors of Ti-polycide gate stack during gate re-oxidation
Tae-Kyun Kim; Se-Aug Jang; Jun-Mo Yang; Tae-Su Park; In-Seok Yeo; Jae-Sung Roh; Jeong-Mo Hwang
2000
2000, vol.100, no.147
Prospects and key issues for compound semiconductor quantum devices
Hideki Hasegawa; Seiya Kasai
2000
2000, vol.100, no.147
Development activities at ASET for 100-nm lithography and beyond
Shinji Okazaki
2000
2000, vol.100, no.147
A novel integration technology for gigabit DRAM with 0.115μm design rule
Hyuppil Noh; Sangdon Lee; Woncheol Cho; Jongrim Lee; Gucheol Jeong; Sung-keun Chang; Hyunjo Yang; Dongseok Kim; Junki Kim; Jisoo Park; Junsik Lee; Jinwon Park; Hee-koo Yoon
2000
2000, vol.100, no.147
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