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期刊
ISSN
0913-5685
刊名
電子情報通信学会技術研究報告
参考译名
电子信息通信学会技术研究报告:电子装置
收藏年代
2000~2024
关联期刊
参考译名
收藏年代
電子情報通信学会技術研究報告
电子信息通信学会技术研究报告:电子装置
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2001, vol.101, no.104
2001, vol.101, no.14
2001, vol.101, no.15
2001, vol.101, no.160
2001, vol.101, no.161
2001, vol.101, no.162
2001, vol.101, no.294
2001, vol.101, no.295
2001, vol.101, no.313
2001, vol.101, no.337
2001, vol.101, no.500
2001, vol.101, no.501
2001, vol.101, no.549
2001, vol.101, no.550
2001, vol.101, no.551
2001, vol.101, no.617
2001, vol.101, no.618
2001, vol.101, no.619
2001, vol.101, no.721
2001, vol.101, no.78
2001, vol.101, no.79
2001, vol.101. no.415
2001, vol.101. no.416
题名
作者
出版年
年卷期
Ni Germano-salicide technology for high performance MOSFETs
Siyoung Choi; J. -H. Ku; C. -J. Choi; K. Fujihara; H. -K. Kang; J. -T. Moon
2001
2001, vol.101, no.160
A new chemical mechanical polishing method using the frozen etchant pad
Youn-Jin Oh; Gyung-Soon Park; Sung Yong Park; Jae -Ok Ryu; Tae Woo Jung; Il-Wook Kim; Chan-Hwa Chung
2001
2001, vol.101, no.160
Nanoscale poly-Si line formation and its uniformity
Woo Young Choi; Suk Kang Sung; Kyung Rok Kim; Jong Duk Lee; Byung-Gook Park
2001
2001, vol.101, no.160
Low temperature nitridation of Si oxide utilizing activated nitrogen
Yukiharu Uraoka; Kosuke Sasada; Hiroshi Yano; Tomoaki Hatayama; T. Fuyuki
2001
2001, vol.101, no.160
Influence of silicon wafer loading conditions on thickness uniformity of sub-5nm-thick oxide films
Markus Lenski; Yasutaka Kimura; Makoto Iwai; Hiroshi Sakuraba; Tetsuo Endoh; Fujio Masuoka
2001
2001, vol.101, no.160
Improved oxide etching by the enhanced inductively coupled plasma
S. -G. Park; S. -B. Cho; H. -Y. Song; B. -H. O; J. -S. Oh; J. -W. Kim
2001
2001, vol.101, no.160
Characteristics of SiO{sub}2 films formed at low temperature by remote plasma oxidation
T. Iida; M. Kanehiro; T. Kimoto; H. Matsunami
2001
2001, vol.101, no.160
Effects of WSi{sub}x-polycide gate processes on MOSFET reliability and characteristics
Jin-Yang Kim; Yong-Chul Oh; Dong-Hyun Kim; Kyu-Taek Hyun; Hyoung-Woen Seo; Dae-Joong Won; Moon-Mo Jeong; Yun-Jae Lee; Yoon-Jae Man; Sang-Hyun Lee; Ho-Won Sun; Se-Myeong Jang; Chang-Huhn Lee; Hyun-Chang Kim
2001
2001, vol.101, no.160
Side-gate length optimization for 50nm induced source/drain MOSFETs
Byung Yong Choi; Woo Young Choi; Young Jin Choi; Jong Duk Lee; Byung-Gook Park
2001
2001, vol.101, no.160
Short channel effect on variable threshold voltage CMOS (VTCMOS)
Hyunsik Im; T. Inukai; T. Saraya; T. Sakurai; T. Hiramoto
2001
2001, vol.101, no.160
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