中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998~2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2011, vol.20, no.1 2011, vol.20, no.2 2011, vol.20, no.3 2011, vol.20, no.4 2011, vol.20, no.5 2011, vol.20, no.6

题名作者出版年年卷期
Silica-Encapsulated Nanoparticle Films as Surface Modifications for MEMSKendall M. Hurst; Naveed Ansari; Christopher B. Roberts; W. Robert Ashurst20112011, vol.20, no.5
Quality Factor Enhancement of Lateral Microresonators in Liquid Media by Hydrophobic CoatingDeniz Eroglu; Haluk Kulah20112011, vol.20, no.5
Gamma Irradiation Effects on Surface-Micromachined Polysilicon ResonatorsLei Wang; Jieying Tang; Qing-An Huang20112011, vol.20, no.5
In Situ Tuning of Focused-Ion-Beam Defined Nanomechanical Resonators Using Joule HeatingLasse V. Homann; Tim Booth; Anders Lei; Dirch Hjorth Petersen; Zachary J. Davis; Peter Boggild20112011, vol.20, no.5
Postfabrication Electrical Trimming of Silicon Micromechanical Resonators via Joule HeatingAshwin K. Samarao; Farrokh Ayazi20112011, vol.20, no.5
Microbricks for Three-Dimensional Reconfigurable Modular MicrosystemsJonathan D. Hiller; Joseph Miller; Hod Lipson20112011, vol.20, no.5
Impedance-Based Force Transduction Within Fluid-Filled Parylene MicrostructuresChristian A. Gutierrez; Ellis Meng20112011, vol.20, no.5
Development and Characterization of Multisite Three-Dimensional Microprobes for Deep Brain Stimulation and RecordingArash A. Fomani; Raafat R. Mansour; Carlos M. Florez-Quenguan; Peter L. Carlen20112011, vol.20, no.5
A Fully Passive Wireless Microsystem for Recording of Neuropotentials Using RF Backscattering MethodsHelen N. Schwerdt; Wencheng Xu; Sameer Shekhar; Abbas Abbaspour-Tamijani; Bruce C. Towe; Felix A. Miranda; Junseok Chae20112011, vol.20, no.5
Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output PowerHuicong Liu; Cho Jui Tay; Chenggen Quan; Takeshi Kobayashi; Chengkuo Lee20112011, vol.20, no.5
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