中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2000, vol.9, no.1 2000, vol.9, no.2 2000, vol.9, no.3 2000, vol.9, no.4

题名作者出版年年卷期
Three-axes monolithic silicon low-g accelerometerSebastian Butefisch; Axel Schoft; Stephanus Buttgenbach20002000, vol.9, no.4
Surface/bulk micromachined single-crystalline-silicon micro-gyroscopeSangwoo Lee; Sangjun Park; Jongpal Kim; Sanguchul Lee; Dong-il (Dan) Cho20002000, vol.9, no.4
Stroboscopic interferometer system for dynamic MEMS characterizationMatthew R. Hart; Robert A. Conant; Kam Y. Lau; Richard S. Muller20002000, vol.9, no.4
Multi-walled microchannels: free-standing porous silicon membranes for use in μTASR. Willem Tjerkstra; Johannes G. E. Gardeniers; John J. Kelly; Albert van den Berg20002000, vol.9, no.4
Meshless analysis of steady-state electro-osmotic transportM. J. Mitchell; R. Qiao; N. R. Aluru20002000, vol.9, no.4
High-speed imaging by electro-magnetically actuated probe with dual springDong-weon Lee; Takahito Ono; Masayoshi Esashi20002000, vol.9, no.4
Gas mixture analysis using silicon micro-reactor systemsT. Becker; S. Muhlberger; C. Bosch-v. Braunmuhl; G. Muller; A. Meckes; W. Benccke20002000, vol.9, no.4
Fabrication of silicon and oxide membranes over cavities using ion-cut layer transferChang-Han Yun; Nathan W. Cheung20002000, vol.9, no.4
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFMTakahiro Namazu; Yoshitada Isono; Takeshi Tanaka20002000, vol.9, no.4
Design and fabrication of a cross flow micro heat exchangerChad Harris; Micrea Despa; Kevin Kelly20002000, vol.9, no.4
1234567



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024