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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
2000
2001
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2000, vol.9, no.1
2000, vol.9, no.2
2000, vol.9, no.3
2000, vol.9, no.4
题名
作者
出版年
年卷期
1/F noise considerations for the design and process optimization of piezoresistive cantilevers
Jonah A. Harley; Thomas W. Kenny
2000
2000, vol.9, no.2
A method for achieving constant rotation rates in a microorthogonal linkage system
L. A. Romero; F. M. Dickey; S. C. Holswade
2000
2000, vol.9, no.2
Computer-aided generation of nonlinear educed-order dynamic macromodels--I: non-stress-stiffened case
Lynn D. Gabbay; Jan E. Mehner; Stephen D. Senturia
2000
2000, vol.9, no.2
Computer-aided generation of nonlinear reduced-order dynamic macromodels--II: stress-stiffened case
Jan E. Mehner; Lynn D. Gabbay; Stephen D. Senturia
2000
2000, vol.9, no.2
Dendritic materials as a dry-release sacrificial layer
Hyuk-Jeen Suh; Pamidighantam Bharathi; David J. Beebe; Jeffrey S. Moore
2000
2000, vol.9, no.2
Design, fabrication, and testing of a bistable electromagnetically actuated microvalve
Micrea Capanu; James G. Boyd IV; Peter J. Hesketh
2000
2000, vol.9, no.2
Microelectromechanical digital-to-analog converters of displacement for step motion actuators
Hiroshi Toshiyoshi; Dai Kobayashi; Makoto Mita; Gen Hashiguchi; Hiroyuki Fujita; Junji Endo; Yasuo Wada
2000
2000, vol.9, no.2
Micromachining process simulation using a continuous cellular automata method
Zhenjun Zhu; Chang Liu
2000
2000, vol.9, no.2
On a tunable bistable MEMS--theory and experiment
M. Taher; A. Saif
2000
2000, vol.9, no.2
Passive mixing in a three-dimensional serpentine microchannel
Robin H. Liu; Mark A. Stremler; Kendra V. Sharp; Michael G. Olsen; Juan G. Santigao; Ronald J. Adrian; Hassan Aref; David J. Beebe
2000
2000, vol.9, no.2
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