中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2000, vol.9, no.1 2000, vol.9, no.2 2000, vol.9, no.3 2000, vol.9, no.4

题名作者出版年年卷期
A high-performance planar piezoresistive accelerometerAaron Partridge; J. Kurth Reynolds; Benjamin W. Chui; Eugene M. Chow; Alissa M. Fitzgerald; Lian Zhang; Nadim I. Maluf; Thomas W. Kenny20002000, vol.9, no.1
A miniature pressure system with a capacitive sensor and a passive telemetry link for use in implantable applicationsStavros Chatzandroulis; Dimitris Tsoukalas; Peter A. Neukomm20002000, vol.9, no.1
A three-dimensional shape memory alloy microelectrode with clipping structure for insect neural recordingShoji Takeuchi; Isao Shimoyama20002000, vol.9, no.1
Air-bearing sliders and plane-plane-concave tips for atomic force microscope cantileversRobert P. Ried; H. Jonathan Mamin; Daniel Rugar20002000, vol.9, no.1
Design and performance of a micro-sized biomorphic compound eye with a scanning retinaKazunori Hoshino; Fabrizio Mura; Isao Shimoyama20002000, vol.9, no.1
Electrostatic model for an asymmetric combdriveJ. -L. Andrew Yeh; Chung-Yuen Hui; Norman C. Tien20002000, vol.9, no.1
Lamb-wave microdevices fabricated on monolithic single crystal silicon wafersDaniel Fischer; Walter J. Varhue; Junru Wu; Charles A. Whiting20002000, vol.9, no.1
Localized silicon fusion and eutectic bonding for MEMS fabrication and packagingY. T. Cheng; Liwei Lin; Khalil Najafi20002000, vol.9, no.1
Microfabricated small metal cantilevers with silicon tip for atomic force microscopyAmi Chand; Mario B. Viani; Tilman E. Schaffer; Paul K. Hansma20002000, vol.9, no.1
Micromachined silicon resonant strain gauges fabricated using SOI wafer technologySteve P. Beeby; Graham Ensell; Brian R. Baker; M. John Tudor; Neil M. White20002000, vol.9, no.1
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