中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2000, vol.9, no.1 2000, vol.9, no.2 2000, vol.9, no.3 2000, vol.9, no.4

题名作者出版年年卷期
A new technique for producing large-area as-deposited zero-stress LPCVD polysilicon films: the MultiPoly processJie Yang; Harold Kahn; An-Qiang He; Stehen M. Phillips; Arthur H. Heuer20002000, vol.9, no.4
A novel parametric-effect MEMS amplifierJean-Pierre Raskin; Andrew R. Brown; Butrus T. Khuri-Yakub; Gabriel M. Rebeiz20002000, vol.9, no.4
A six-wafer combustion system for a silicon micro gas turbine engineAmit Mehra; Xin Zhang; Arturo A. Ayon; Ian A. Waitz; Martin A. Schmidt; Christopher M. Spadaccini20002000, vol.9, no.4
A traction stress sensor array for use in high-resolution robotic tactile imagingBart J. Kane; Mark R. Cutkosky; Gregory T. A. Kovacs20002000, vol.9, no.4
A universal electromagnetic microactuator using magnetic interconnection conceptsDaniel J. Sadler; Trifon M. Liakopoulos; Chong H. Ahn20002000, vol.9, no.4
An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining processNavid Yazdi; Khalil Najafi20002000, vol.9, no.4
An improved anodic bonding process using pulsed voltage techniqueThomas M. H. Lee; I. -Ming Hsing; Connie Y. N. Liaw20002000, vol.9, no.4
An optical IR-source and CO{sub}2-chamber system for CO{sub}2 measurementsThierry Corman; Edvard Kalvesten; Matti Huiku; Kurt Weckstrom; Pekka; Tuomo Merilainen; Goran Stemme20002000, vol.9, no.4
Contamination-insensitive differential capacitive pressure sensorsChuanChe Wang; Bishnu P. Gogoi; David J. Monk; Carlos H. Mastrangelo20002000, vol.9, no.4
Design and fabrication of a cross flow micro heat exchangerChad Harris; Micrea Despa; Kevin Kelly20002000, vol.9, no.4
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