中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0947-076X
刊名Vakuum in Forschung und Praxis
参考译名真空研究与实践
收藏年代1998~2023



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2000, vol.12, no.1 2000, vol.12, no.2 2000, vol.12, no.3 2000, vol.12, no.4 2000, vol.12, no.5 2000, vol.12, no.6

题名作者出版年年卷期
An emerging technology for robust and nonvolatile electronic elementsStefan Mengel20002000, vol.12, no.1
Downstream management of modern semiconductor vacuum toolsDirk Gennermann20002000, vol.12, no.1
Innovative applications of plasma technologiesKarin Reichel20002000, vol.12, no.1
PVD coating of metallic sheets and stripsChr. Metzner20002000, vol.12, no.1
Quo vadis nanotechnology?Gerd Bachmann20002000, vol.12, no.1
Study of the plasma of the reactive low voltage ion plating processG. N. Strauss; H. K. Pulker20002000, vol.12, no.1
Surface treatment of polymers with glow dischargesChristian Oehr; Herwig Brunner20002000, vol.12, no.1