中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0947-076X
刊名Vakuum in Forschung und Praxis
参考译名真空研究与实践
收藏年代1998～2023



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2006, no.1sup 2006, no.2006sup 2006, vol.18, no.1 2006, vol.18, no.2 2006, vol.18, no.3 2006, vol.18, no.4
2006, vol.18, no.5 2006, vol.18, no.6

题名作者出版年年卷期
Mechatronic solutions in dry running vacuum pumpsHeiner Kosters20062006, no.2006sup
Plasma deposition technology for solar cell manufacturingSilvia Roth20062006, no.2006sup
Thin films of ITO as transparent electrodesDieter Mergel20062006, no.2006sup
Functionalization of Microstructure SurfacesHolger Reinecke; Oliver Lippold; Andreas Ohl; Wilfried Besch; Carsten Schroder; Friedrich Gotz20062006, no.2006sup
Industrial vacuum leak detection with intelligent gas leak detectors: Not just a mass spectrometerWerner Grosse Bley20062006, no.2006sup
Mesoporous SiO{sub}2 as low-k dielectric for integration in Cu/low-k interconnect systemsSwantje Fruhauf; Stefan E. Schulz; Thomas Gessner20062006, no.2006sup
Vacuum Coating Technology For Optical Data Storage MediaBernhard Cord; Michael Mucke; Eggo Sichmann20062006, no.2006sup
Ion Sources for Vacuum Thin Film TechnologyRalf Reuschling; Eberhard Schultheiss20062006, no.2006sup
Design and fabrication of selective thin film absorbers on the basis of silver island filmsPetra Heger; Olaf Stenzel; Norbert Kaiser20062006, no.2006sup



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