中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0918-242X
刊名技報 安川電機
参考译名安川电机
收藏年代1997～2021



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2021

1998, vol.62, no.2 1998, vol.62, no.3

题名作者出版年年卷期
8inches wafer transfer system in vacuumHideharu Zenpo; Shinobu Sato; Shigemi Nobayashi; Tadataka Noguchi; Masahiko Ryu19981998, vol.62, no.2
Actuators for semiconductor manufacturing systemsKoji Takeshita; Hiroyuki Kamada; Teruaki Doi; Takayoshi Nakao; Motonori Matsushita19981998, vol.62, no.2
History of super mechatronics technologyTakeo Suzuki19981998, vol.62, no.2
Magnetic encoder application to the actuators for semiconductor processingSatoshi Murakami; Koji Suzuki; Yuji Arinaga19981998, vol.62, no.2
Pull-based multi-agent scheduling in wafer transfer systemsAlbert Shiina; Atsunobu Sakata19981998, vol.62, no.2
Robots and controllers for 300mm wafer transfer in vacuumHirohiko Goto; Kazunori Hino; Junichi Okada19981998, vol.62, no.2
Surface finish and evaluation technology on aluminum for vacuum environmentNobuhiko Ota; Yuto Fukuma19981998, vol.62, no.2
Wafer transfer system for clean environmentMasaru Ogasawara; Masatoshi Furuichi; Kazuhiro Tomiyasu; Kimihiro Nagatomo; Hidenari Ono19981998, vol.62, no.2
Wear life equations of solid-lubricated bearings for vacuumTadayoshi Itabe; Shuji Yamazumi; Teruaki Imai; Kenji Sunahara19981998, vol.62, no.2



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