中国机械工程学会生产工程分会知识服务平台 | sc.gmachineinfo.com

期刊

ISSN	0912-0289
刊名	精密工学会誌
参考译名	日本精密工程学会志
收藏年代	1998～2023

全部

1998	1999	2000	2001	2002	2003
2007	2008	2009	2011	2012	2013
2014	2015	2016	2017	2018	2019
2020	2021	2022	2023

2001, vol.67, no.1	2001, vol.67, no.10	2001, vol.67, no.11	2001, vol.67, no.12	2001, vol.67, no.2	2001, vol.67, no.3
2001, vol.67, no.4	2001, vol.67, no.5	2001, vol.67, no.6	2001, vol.67, no.7	2001, vol.67, no.8	2001, vol.67, no.9

题名

作者

出版年

年卷期

Present and future technologies in the application of charged-particle beam

Akio Takaoka

2001

2001, vol.67, no.9

E-beam lithography system for pattern generation

Norio Saitou

2001

2001, vol.67, no.9

Development of low energy electron beam proximity projection lithography

Nobuo Shimazu

2001

2001, vol.67, no.9

Application of charged particle equipments in LSI photomask manufacturing -current status and prospects

Morihisa Hoga

2001

2001, vol.67, no.9

LSI testing by electron beam probe

Hiromu Fujioka; Koji Nakamae

2001

2001, vol.67, no.9

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Shinji Matsui; Takashi Kaito; Jun-ichi Fujita; Masahiko Ishida; Yukinori Ochiai

2001

2001, vol.67, no.9

Application of electron beams to materials processing

Atsushi Iwata

2001

2001, vol.67, no.9

Compact synchrotron radiation ring for industrial X-ray light source

Masaoki Hirose

2001

2001, vol.67, no.9

Wear estimation of ball end mill and its application to precision machining of curved surface

Jin Kayama; Tsukasa Kondo; Shun'ichi Kaneko; Satoru Igarashi

2001

2001, vol.67, no.9

Prediction of chip formation and cutting forces in drilling with curved cutting edge drills (2nd report) - comparison of calculated and experimental results

Kazuo Kasahara; Akihiko Hirota; Tuyoshi Kawasaki

2001

2001, vol.67, no.9