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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
2000
2001
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2005
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2013
1999, vol.8, no.1
1999, vol.8, no.2
1999, vol.8, no.3
1999, vol.8, no.4
题名
作者
出版年
年卷期
A merged process for thick single-crystal Si resonators and BiCMOS circuitry
J. W. Weigold; A. -C. Wong; C. T. -C. Nguyen; S. W. Pang
1999
1999, vol.8, no.3
A multilevel Newton method for mixed-energy domain simulation of MEMS
N. R. Aluru; Jacob White
1999
1999, vol.8, no.3
A thermal inkjet printhead with a monolithically fabricated Nozzle plate and self-aligned ink feed hole
Jae-Duk Lee; Jun-Bo Yoon; Jae-Kwan Kim; Hoon-Ju Chung; Choon-Sup Lee; Hi-Deok Lee; Ho-Jun Lee; Choon
1999
1999, vol.8, no.3
Analytical modeling of electrostatic membrane actuator for micro pumps
M. T. A. Saif; B. Erdem Alaca; Huseyin Sehitoglu
1999
1999, vol.8, no.3
CARAMEL: contamination and reliability analysis of microelectromechanical layout
Abhijeet Kolpekwar; Tao Jiang; R. D. (Shawn) Blanton
1999
1999, vol.8, no.3
Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology
Helene Debeda; Thilo V. Freyhold; Jurgen Mohr; Ulrike Wallrabe; Jorg Wengelink
1999
1999, vol.8, no.3
Experimental evaluation of MEMS strain sensors embedded in composites
Charles Hautamaki; Shayne Zurn; Susan C. Mantell; Dennis L. Polla
1999
1999, vol.8, no.3
Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines
N. Rajan; M. Mehregany; Christian A. Zorman; S. Stefanescu; T. P. Kicher
1999
1999, vol.8, no.3
Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs
Elmer S. Hung; Stephen D. Senturia
1999
1999, vol.8, no.3
Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation
Florence Gretillat; Marc-Alexis Gretillat; Nicolaas F. de Rooij
1999
1999, vol.8, no.3
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