中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2003, vol.12, no.1 2003, vol.12, no.2 2003, vol.12, no.3 2003, vol.12, no.4 2003, vol.12, no.5 2003, vol.12, no.6

题名作者出版年年卷期
New Low-Stress PECVD Poly-SiGe Layers for MEMSCristina Rusu; Sherif Sedky; Brigette Parmentier; Agnes Verbist; Olivier Richard; Bert Brijs; Luc Geenen; Ann Witvrouw; Franz Larmer; Frank Fischer; Silvia Kronmuller; Victor Leca; Bert Otter20032003, vol.12, no.6
A Multiple Electrostatic Electrodes Torsion Micromirror Device With Linear Stepping Angle EffectJin-Chern Chiou; Yu-Chen Lin20032003, vol.12, no.6
MOEMS Tuning Element for a Littrow External Cavity LaserRichard. R. A. Syms; Anke Lohmann20032003, vol.12, no.6
Digitally Tunable Microfluidic Optical Fiber DevicesFrancesco Cattaneo; Kirk Baldwin; Shu Yang; Tom Krupenkine; Siddharth Ramachandran; John A. Rogers20032003, vol.12, no.6
Analytical Behavior of Rectangular Electrostatic Torsion Actuators With Nonlinear Spring BendingZhixiong Xiao; Wuyong Peng; K. R. Farmer20032003, vol.12, no.6
Electromechanical Coupling Correction for Piezoelectric Layered BeamsEllad B. Tadmor; Gabor Kosa20032003, vol.12, no.6
Power Delivery and Locomotion of Untethered MicroactuatorsBruce Randall Donald; Christopher G. Levey; Craig D. McGray; Daniela Rus; Mike Sinclair20032003, vol.12, no.6
A Static Turbine Flow Meter With a Micromachined Silicon Torque SensorNiklas Svedin; Erik Stemme; Goran Stemme20032003, vol.12, no.6
Development and Characterization of Surface Micromachined, Out-of-Plan Hot-Wire AnemometerJack Chen; Chang Liu20032003, vol.12, no.6
Out-of-Plane High-Q Inductors on Low-Resistance SiliconChristopher L. Chua; David K. Fork; Koenraad Van Schuylenbergh; Jeng-Ping Lu20032003, vol.12, no.6
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