中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2007, vol.16, no.1 2007, vol.16, no.2 2007, vol.16, no.3 2007, vol.16, no.4 2007, vol.16, no.5 2007, vol.16, no.6

题名作者出版年年卷期
Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction MonitorErik J. Thoreson; J. Martin; N. A. Burnham20072007, vol.16, no.3
Snap-Through and Pull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic LoadingYin Zhang; Yisong Wang; Zhihong Li; Yubo Huang; Dachao Li20072007, vol.16, no.3
Stroboscopic Imaging Interferometer for MEMS Performance MeasurementJosh A. Conway; Jon V. Osborn; Jesse David Fowler20072007, vol.16, no.3
A Nondestructive Dynamic Characterization of a Microheater Through Digital Holographic MicroscopyGiuseppe Coppola; Valerio Striano; Pietro Ferraro; Sergio De Nicola; Andrea Finizio; Giovanni Pierattini; Piera Maccagnani20072007, vol.16, no.3
Microrelays With Bidirectional Electrothermal Electromagnetic Actuators and Liquid Metal Wetted ContactsAndrew Cao; Phyllis Yuen; Liwei Lin20072007, vol.16, no.3
Bulk-Micromachined Test Structure for Fast and Reliable Determination of the Lateral Thermal Conductivity of Thin FilmsLuigi La Spina; Alexander W. van Herwaarden; Hugo Schellevis; Wim H. A. Wien; Nebojsa Nenadovic; Lis K. Nanver20072007, vol.16, no.3
Versatile Method of Submicroparticle Pattern Formation Using Self-Assembly and Two-Step TransferTakashi Ozaki; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata20072007, vol.16, no.3
A Multiaxis Force Sensor for the Study of Insect BiomechanicsMichael S. Bartsch; Walter Federle; Robert J. Full; Thomas W. Kenny20072007, vol.16, no.3
A Low-Temperature Thermopneumatic Actuation Principle for Gas Bubble MicrovalvesWouter van der Wijngaart; Dipankar Chugh; Elisabeth Man; Jessica Melin; Goran Stemme20072007, vol.16, no.3
A MEMS-Based Evaluation of the Mechanical Properties of Metallic Thin FilmsArun Reddy; H. Kahn; Arthur H. Heuer20072007, vol.16, no.3
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