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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2003
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2005
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2010
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2013
2010, vol.19, no.1
2010, vol.19, no.2
2010, vol.19, no.3
2010, vol.19, no.4
2010, vol.19, no.5
2010, vol.19, no.6
题名
作者
出版年
年卷期
Experimental Validation of Mixed Electromechanical and Electromagnetic Modeling of RF-MEMS Devices Within a Standard IC Simulation Environment
Jacopo Iannacci; Roberto Gaddi; Antonio Gnudi
2010
2010, vol.19, no.3
Micromechanical IBARs: Modeling and Process Compensation
Gavin K. Ho; John Kangchun Perng; Farrokh Ayazi
2010
2010, vol.19, no.3
Wafer-Level Transfer Technologies for PZT-Based RF MEMS Switches
Roland Guerre; Ute Drechsler; Debabrata Bhattacharyya; Pekka Rantakari; Richard Stutz; Robert V. Wright; Zlatoljub D. Milosavljevic; Tauno Vaha-Heikkila; Paul B. Kirby; Michel Despont
2010
2010, vol.19, no.3
Development of a High-Performance Microelectrostatic Repulsive-Force Rotation Actuator
Siyuan He; R. Ben Mrad; J. S. Chang
2010
2010, vol.19, no.3
Micromechanical IBARs: Tunable High-Q Resonators for Temperature-Compensated Reference Oscillators
Gavin K. Ho; Krishnakumar Sundaresan; Siavash Pourkamali; Farrokh Ayazi
2010
2010, vol.19, no.3
High-Capacitance-Ratio Warped-Beam Capacitive MEMS Switch Designs
Reena Al-Dahleh; Raafat R. Mansour
2010
2010, vol.19, no.3
Chip-Scale Quadrupole Mass Filters for Portable Mass Spectrometry
Kerry Cheung; Luis Fernando Velasquez-Garcia; Akintunde Ibitayo Akinwande
2010
2010, vol.19, no.3
Design, Fabrication, and Application of Bio-Implantable Acoustic Power Transmission
Po-Jen Shih; Wen-Pin Shih
2010
2010, vol.19, no.3
Novel Capacitive Pressure Sensor
Ezzat G. Bakhoum; Marvin H. M. Cheng
2010
2010, vol.19, no.3
Thermally Actuated Omnidirectional Walking Microrobot
E. Yegan Erdem; Yu-Ming Chen; Matthew Mohebbi; John W. Suh; Gregory T. A. Kovacs; Robert B. Darling; Karl F. Bohringer
2010
2010, vol.19, no.3
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