中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2012, vol.21, no.1 2012, vol.21, no.2 2012, vol.21, no.3 2012, vol.21, no.5 2012, vol.21, no.6

题名作者出版年年卷期
Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale GlassblowingSergei A. Zotov; Alexander A. Trusov; Andrei M. Shkel20122012, vol.21, no.3
Characterization of Contact Resistance Stability in MEM Relays With Tungsten ElectrodesYenhao Chen; Rhesa Nathanael; Jaeseok Jeon; Jack Yaung; Louis Hutin; Tsu-Jae King Liu20122012, vol.21, no.3
Linear-Stiffness Rotary MEMS StageUtku Baran; Wyatt O. Davis; Sven Holmstrom; Dean Brown; Jaibir Sharma; Sertan Kutal Gokce; Hakan Urey20122012, vol.21, no.3
Controlled Chemical Etching of ZnO Film for Step Coverage in MEMS Acoustic SensorMahanth Prasad; R. P. Yadav; V. Sahula; V. K. Khanna; Chandra Shekhar20122012, vol.21, no.3
Experimental Technique for Fatigue Testing of MEMS in LiquidsShaikh Mubassar Ali; Susan C. Mantell; Ellen K. Longmire20122012, vol.21, no.3
Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to C_(60) Nanowire TestingToshiyuki Tsuchiya; Yasutake Ura; Koji Sugano; Osamu Tabata20122012, vol.21, no.3
Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack-Hartmann Wavefront SensorChenhui Li; Gunnsteinn Hall; Difeng Zhu; Heng Li; Kevin W. Eliceiri; Hongrui Jiang20122012, vol.21, no.3
Characterization of Adhesion Force in MEMS at High Temperature Using Thermally Actuated MicrostructuresM. Shavezipur; Wenjuan Gou; Carlo Carraro; Roya Maboudian20122012, vol.21, no.3
Modeling, Analysis, and Experimental Validation of a Bifurcation-Based MicrosensorVijay Kumar; Yushi Yang; J. William Boley; George T. C. Chiu; Jeffrey F. Rhoads20122012, vol.21, no.3
Dielectric Charge Control in Electrostatic MEMS Positioners/VaractorsElena Blokhina; Sergi Gorreta; David Lopez; David Molinero; Orla Feely; Joan Pons-Nin; Manuel Dominguez-Pumar20122012, vol.21, no.3
123456



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024