中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0957-0233
刊名Measurement Science & Technology
参考译名测量科学与技术
收藏年代1990～2013



全部

1990 1991 1992 1993 1999 2000
2001 2002 2003 2004 2005 2006
2007 2008 2009 2010 2011 2012
2013

2011, vol.22, no.1 2011, vol.22, no.10 2011, vol.22, no.11 2011, vol.22, no.12 2011, vol.22, no.2 2011, vol.22, no.4
2011, vol.22, no.5 2011, vol.22, no.6 2011, vol.22, no.7 2011, vol.22, no.8 2011, vol.22, no.9

题名作者出版年年卷期
Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrologyMichael Krumrey; Gudrun Gleber; Frank Scholze; Jan Wernecke20112011, vol.22, no.9
White-light fringe detection based on a novel light source and colour CCD cameraZ. Buchta; B. Mikel; J. Lazar; O. Cip20112011, vol.22, no.9
Multidimensional interferometric tool for the local probe microscopy nanometrologyJan Hrabina; Josef Lazar; Petr Klapetek; Ondrej Cip20112011, vol.22, no.9
Toward interferometry for dimensional drift measurements with nanometer uncertaintyD. Voigt; J. D. Ellis; A. L. Verlaan; R. H. Bergmans; J. W. Spronck; R. H. Munnig Schmidt20112011, vol.22, no.9
Measuring value correction and uncertainty analysis for homodyne interferometersT. Hausotte; B. Percle; E. Manske; R. Fussl; G. Jager20112011, vol.22, no.9
A method for linearization of a laser interferometer down to the picometre level with a capacitive sensorJeremias Seppa; Virpi Korpelainen; Mikko Merimaa; Gian Bartolo Picotto; Antti Lassila20112011, vol.22, no.9
Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre rangeSebastian Strube; Gabor Molnar; Hans-Ulrich Danzebrink20112011, vol.22, no.9
High-accuracy Fabry-Perot displacement interferometry using fiber lasersMathieu Durand; John Lawall; Yicheng Wang20112011, vol.22, no.9
Deep ultraviolet scatterometer for dimensional characterization of nanostructures: system improvements and test measurementsMatthias Wurm; Stefanie Bonifer; Bernd Bodermann; Jan Richter20112011, vol.22, no.9
A high-resolution measurement system for novel scanning thermal microscopy resistive nanoprobesGrzegorz Wielgoszewski; Przemyslaw Sulecki; Pawel Janus; Piotr Grabiec; Ehrenfried Zschech; Teodor Gotszalk20112011, vol.22, no.9
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