中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2005, vol.14, no.1 2005, vol.14, no.2 2005, vol.14, no.3 2005, vol.14, no.4 2005, vol.14, no.5 2005, vol.14, no.6

题名作者出版年年卷期
Design and Optimization of a MEMS Electret-Based Capacitive Energy ScavengerFabio Peano; Tiziana Tambosso20052005, vol.14, no.3
Optimization of a Thermal Flow Sensor for Acoustic Particle Velocity MeasurementsJoost W. van Honschoten; Vitaly B. Svetovoy; Gijs J. M. Krijnen; Miko C. Elwenspoek20052005, vol.14, no.3
An X-Axis Single-Crystalline Silicon Microgyroscopej Fabricated by the Extended SBM ProcessJongpal Kim; Sangjun Park; Donghun Kwak; Hyoungho Ko; Dong-il Dan Cho20052005, vol.14, no.3
Reconfigurable Millimeter-Wave Filters Using CPW-Based Periodic Structures With Novel Multiple-Contact MEMS SwitchesJae-Hyoung Park; Sanghyo Lee; Jung-Mu Kim; Hong-Teuk Kim; Youngwoo Kwon; Yong-Kweon Kim20052005, vol.14, no.3
RF MEMS Membrane Switches on GaAs Substrates for X-Band ApplicationsWei-Bin Zheng; Qing-An Huang; Xiao-Ping Liao; Fu-Xiao Li20052005, vol.14, no.3
Arrays of Hollow Out-of-Plane Microneedles for Drug DeliveryBoris Stoeber; Dorian Liepmann20052005, vol.14, no.3
A Three-Dimensional Dielectrophoretic Particle Focusing Channel for Microcytometry ApplicationsChoongho Yu; Jody Vykoukal; Daynene M. Vykoukal; Jon A. Schwartz; Li Shi; Peter R. C. Gascoyne20052005, vol.14, no.3
A Hybrid PZT-Silicon MicrovalveRajesh Duggirala; Amit Lai20052005, vol.14, no.3
Multiple-Stage Microfabricated Preconcentrator-Focuser for Micro Gas Chromatography SystemWei-Cheng Tian; Helena K. L. Chan; Chia-Jung Lu; Stella W. Pang; Edward T. Zellers20052005, vol.14, no.3
Design, Fabrication, and Characterization of a Submicroelectromechanical Resonator With Monolithically Integrated CMOS Readout CircuitJaume Verd; G. Abadal; J. Teva; Maria Villarroya Gaudo; Arantxa Uranga; Xavier Borrise; Francesca Campabadal; Jaume Esteve; Eduardo Figueras Costa; Francesc Perez-Murano; Zachary J. Davis; Esko Forsen; Anja Boisen; Nuria Barniol20052005, vol.14, no.3
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