中国机械工程学会生产工程分会知识服务平台
主页
文献资源
外文期刊
外文会议
中文期刊
专业机构
生产工程
智能制造
高级检索
关于我们
版权声明
使用帮助
期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2005, vol.14, no.1
2005, vol.14, no.2
2005, vol.14, no.3
2005, vol.14, no.4
2005, vol.14, no.5
2005, vol.14, no.6
题名
作者
出版年
年卷期
Three-Dimensional Thin-Film Li-Ion Microbatteries for Autonomous MEMS
Menachem Nathan; Diana Golodnitsky; Vladimir Yufit; Ela Strauss; Tania Ripenbein; Inna Shechtman; Svetlana Menkin; Emanuel Peled
2005
2005, vol.14, no.5
Polymer-Core Conductor Approaches for RF MEMS
Yong-Kyu Yoon; Jin-Woo Park; Mark G. Allen
2005
2005, vol.14, no.5
Polymer-Based Wide-Bandwidth and High-Sensitivity Micromachined Electron Tunneling Accelerometers Using Hot Embossing
Tianhong Cui; Jing Wang
2005
2005, vol.14, no.5
Fracture Strength of Silicon Carbide Microspecimens
William N. Sharpe, Jr.; Osama Jadaan; Glenn M. Beheim; George D. Quinn; Noel N. Nemeth
2005
2005, vol.14, no.5
Anodic Oxidation During MEMS Processing of Silicon and Polysilicon: Native Oxides Can Be Thicker Than You Think
Harold Kahn; Chris Deeb; Loannis Chasiotis; Arthur H. Heuer
2005
2005, vol.14, no.5
Microheated Substrates for Patterning Cells and Controlling Development
Wenmiao Shu; W. Neil Everett; Qing X. Zhang; Minghui H. Liu; Alastair Trigg; Yuexia Ma; S. Mark Spearing; Shu Wang; Hung-Jue Sue; Peter M. Moran
2005
2005, vol.14, no.5
Effect of Nanoscale Heating on Electrical Transport in RF MEMS Switch Contacts
Brian D. Jensen; Linda L.-W. Chow; Kuangwei Huang; Kazuhiro Saitou; John L. Volakis; Katsuo Kurabayashi
2005
2005, vol.14, no.5
Adhesion Characteristics of MEMS in Microfluidic
Elizabeth E. Parker; W. Robert Ashurst; Carlo Carraro; Roya Maboudian
2005
2005, vol.14, no.5
MEMS Lubricants Based on Bound and Mobile Phases of Hydrocarbon Compounds: Film Deposition and Performance Evaluation
Kalathil C. Eapen; Steven T. Patton; Steven A. Smallwood; Benjamin S. Phillips; Jeffrey S. Zabinski
2005
2005, vol.14, no.5
Method for Determining a Dynamical State-Space Model for Control of Thermal MEMS Devices
Bruno Borovic; Frank L. Lewis; Dereje Agonafer; Edward S. Kolesar; Mohammad Masum Hossain; Dan O. Popa
2005
2005, vol.14, no.5
1
2
3
4
国家科技图书文献中心
全球文献资源网
京ICP备05055788号-26
机械工业信息研究院 2018-2024