中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2006, vol.15, no.1 2006, vol.15, no.2 2006, vol.15, no.3 2006, vol.15, no.4 2006, vol.15, no.5 2006, vol.15, no.6

题名作者出版年年卷期
Polyurethane Rubber All-Polymer Artificial Hair Cell SensorJonathan M. Engel; Jack Chen; Chang Liu; David Bullen20062006, vol.15, no.4
Effect of Temperature on In-Use Stiction of Cantilever Beams Coated With Perfluorinated Alkysiloxane MonolayersJoelle Frechette; Roya Maboudian; Carlo Carraro20062006, vol.15, no.4
Piezoelectrically Actuated Tunable CapacitorChuang-Yuan Lee; Eun Sok Kim20062006, vol.15, no.4
A MEMS Reconfigurable DGS Resonator for K-Band ApplicationsEhab K. I. Hamad; Amr M. E. Safwat; Abbas S. Omar20062006, vol.15, no.4
High-Resolution Electrostatic Analog Tunable Grating With a Single-Mask Fabrication ProcessWei-Chuan Shih; Sang-Gook Kim; George Barbastathis20062006, vol.15, no.4
Surface and Bulk-Silicon-Micromachined Optical Displacement Sensor Fabricated With the SwIFT-Lite ProcessNeal A. Hall; Murat Okandan; F. Levent Degertekin20062006, vol.15, no.4
Spatial-Mode Analysis of Micromachined Optical Cavities Using Electrothermal Mirror ActuationWei Liu; Joseph J. Talghader20062006, vol.15, no.4
Two-Axis Electromagnetic Microscanner for High Resolution DisplaysArda D. Yalcinkaya; Hakan Urey; Dean Brown; Tom Montague; Randy Sprague20062006, vol.15, no.4
Fully Lagrangian Modeling of MEMS With Thin PlatesSrinivas Telukunta; Subrata Mukherjee20062006, vol.15, no.4
Dynamic Pull-in of Parallel-Plate and Torsional Electrostatic MEMS ActuatorsGregory N. Nielson; George Barbastathis20062006, vol.15, no.4
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