中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2006, vol.15, no.1 2006, vol.15, no.2 2006, vol.15, no.3 2006, vol.15, no.4 2006, vol.15, no.5 2006, vol.15, no.6

题名作者出版年年卷期
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS ResonatorsGianluca Piazza; Philip J. Stephanou; Albert P. (Al)Pisano20062006, vol.15, no.6
Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional ResistanceMustafa U. Demirci; Clark T.-C. Nguyen20062006, vol.15, no.6
Engineering MEMS Resonators With Low Thermoelastic DampingAmy Duwel; Rob N. Candler; Thomas W. Kenny; Mathew Varghese20062006, vol.15, no.6
Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS ResonatorsRob N. Candler; Matthew A. Hopcroft; Bongsang Kim; Woo-Tae Park; Renata Melamud; Manu Agarwal; Gary Yama; Aaron Partridge; Markus Lutz; Thomas W. Kenny20062006, vol.15, no.6
Microfabrication Technology of Biodegradable Polymers for Interconnecting MicrostructuresWonHyoung Ryu; Rainer J. Fasching; Murty Vyakarnam; Ralph S. Greco; Fritz B. Prinz20062006, vol.15, no.6
Vacuum-Packaged Suspended MicroChannel Resonant Mass Sensor for Biomolecular DetectionThomas P. Burg; Amir R. Mirza; Nebojsa Milovic; Christine H. Tsau; George A. Popescu; John S. Foster; Scott R. Manalis20062006, vol.15, no.6
Fabrication of Flexible Neural Probes With Built-in Microfluidic Channels by Thermal Bonding of ParyleneDominik Ziegler; Takafumi Suzuki; Shoji Takeuchi20062006, vol.15, no.6
Oriented and Vectorial Patterning of Cardiac Myocytes Using a Microfluidic Dielectrophoresis Chip - Towards Engineered Cardiac Tissue With Controlled Macroscopic AnisotropyMo Yang; Chee Chew Lim; Ronglih Liao; Xin Zhang20062006, vol.15, no.6
Formation of Microdroplets in Liquids Utilizing Active Pneumatic Choppers on a Microfluidic ChipCheng-Tso Chen; Gwo-Bin Lee20062006, vol.15, no.6
Pneumatically Driven Microcage for Microbe Manipulation in a Biological Liquid EnvironmentJerry Ok; Yen-Wen Lu; Chang-Jin "CJ" Kim20062006, vol.15, no.6
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