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0913-5685
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電子情報通信学会技術研究報告
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电子信息通信学会技术研究报告:可靠性
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2016, vol.116, no.1
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题名
作者
出版年
年卷期
[招待講演]低温プロセスに向けたマイクロ波加熱処理によるNiGe/Ge接合の形成
中塚理; 渡部佳優; 鈴木陽洋; 西義雄; 財満鎭明
2016
2016, vol.116, no.450
Impact of Dry Process Damage on Chemical Mechanical Planarization with Cu/low-k Structure
小寺雅子; 矢野博之; 宮下直人
2016
2016, vol.116, no.450
[招待講演]超長期保管メモリ·システムの必要性とその課題-デジタル時代の和紙を目指して
小林敏夫
2016
2016, vol.116, no.450
[招待講演]モノリシック三次元インバータにおける積層トランジスタの電気的結合とその層間絶縁膜厚依存性
服部淳一; 福田浩一; 入沢寿史; 太田裕之; 前田辰郎
2016
2016, vol.116, no.450
[招待講演]低電力FPGAを実現するビアスイッチ技術を用いた大規模クロスバースイッチの実証
伴野直樹; 多田宗弘; 岡本浩一郎; 井口憲幸; 阪本利司; 波田博光; 越智裕之; 小野寺秀俊; 橋本昌宜; 杉林直彦
2016
2016, vol.116, no.450
[招待講演]ビアラスト型TSVの高留まり化のためのウエット洗浄プロセスの開発
渡辺直也; 菊地秀和; 柳澤あづさ; 島本晴夫; 菊地克弥; 青柳昌宏; 中村彰男
2016
2016, vol.116, no.450
[招待講演]湿式法によるスルーホール付きガラス基板への直接銅めつき
井上浩徳; 高山昌敏; 藤村翼; 鬼武重雄
2016
2016, vol.116, no.450
ALDプロセスによるULSI用高品質金属薄膜の作製
霜垣幸浩
2016
2016, vol.116, no.450
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