中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

1999, vol.5, no.3 1999, vol.5, no.4 1999, vol.6, no.1 1999, vol.6, no.2

题名作者出版年年卷期
Miniaturized plastic micro plates for applications in HTSM. Niggemann; W. Ehrfeld; L. Weber; R. Gunther; O. Sollbohmer19991999, vol.6, no.2
Micro-optical elements and their integration to glass and optoelectronic wafersP. Danberg; L. Erdmann; R. Bierbaum; A. Krehl; A. Brauer; E. B. Kley19991999, vol.6, no.2
Micromachined gas sensors for environmental pollutantsG. Faglia; E. Comini; M. Pardo; A. Taroni; G. Cardinali; S. Nicoletti; G. Sberveglieri19991999, vol.6, no.2
Injection molding of polymeric LIGA HARMsM. S. Despa; K. W. Kelly; J. R. Collier19991999, vol.6, no.2
Fabrication of CVD diamond photoconductive detectorsM. Marinelli; E. Milani; A. Paoletti; A. Tucciarone; G. V. Rinati19991999, vol.6, no.2
Development of a micromachining process for the fabrication of a superconductor magnetic-field sensorA. Natarajan; W. Wang; E. Ma; R. N. Bhattacharya; R. D. Blaugher19991999, vol.6, no.2
Structural characterisation of ionising-radiation detectors based on CVD diamond filmsG. Faggio; M. Marinelli; G. Messina; E. Milani; A. Paoletti; S. Santangelo; G. Verona Rinati19991999, vol.6, no.1
Reactive ion etching for the production of metal microstructures by hot embossingO. Roetting; M. Heckele; W. Bacher19991999, vol.6, no.1
Raman characterisation and hardness proper-ties of diamond-like carbon films grown by pulsed laser deposition techniqueG. Messina; A. Paoletti; S. Santangelo; A. Tebano; A. Tucciarone19991999, vol.6, no.1
Propagation of adhesives in joints during capillary adhesive bonding of micro-componentsA. Gerlach; H. Lambach; D. Seidel19991999, vol.6, no.1
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