中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2005, vol.11, no.1 2005, vol.11, no.11 2005, vol.11, no.12 2005, vol.11, no.2-3 2005, vol.11, no.4-5 2005, vol.11, no.6
2005, vol.11, no.7 2005, vol.11, no.8-10 2005, vol.12, no.1-2

题名作者出版年年卷期
Development of a low cost hybrid Si/PDMS multi-layered pneumatic microvalveGael Thuillier; Chantal Khan Malek20052005, vol.12, no.1-2
Integrated electromagnetic microactuators with a large driving forceC.-T. Pan; H. Yang; M.-C. Chou; S.-C. Shen20052005, vol.12, no.1-2
Stable SOI micromachined electrostatic AC voltage referenceAnu Karkkainen; Panu Pekko; James Dekker; Nadine Pesonen; Mika Suhonen; Aarne Oja; Jukka Kyynarainen; Heikki Seppa20052005, vol.12, no.1-2
SOI-CMOS compatible low-power gas sensor using sputtered and drop-coated metal-oxide active layersP. Ivanov; J. Laconte; J. P. Raskin; M. Stankova; E. Sotter; E. Llobet; X. Vilanova; D. Flandre X. Correig20052005, vol.12, no.1-2
Transient thermal characterisation of hot platesGy. Bognar; P. Furjes; V. Szekely; M. Rencz20052005, vol.12, no.1-2
Reliability study of AlTi/TiW on polysilicon contacts for high temperature sensorsA. Andrei; C. Malhaire; S. Brida; J. M. Dujardin; D. Barbier; O. Legras20052005, vol.12, no.1-2
Preparation of ferroelectric ceramics in a film structure and their photovoltaic propertiesM. Ichiki; Y. Morikawa; Y. Mabune; T. Nakada; K. Nonaka; R. Maeda20052005, vol.12, no.1-2
Feature length-scale modeling of LPCVD and PECVD MEMS fabrication processesLawrence C. Musson; Pauline Ho; Steven J. Plimpton; Rodney C. Schmidt20052005, vol.12, no.1-2
A 3D-CAM system for quick prototyping and microfabrication using excimer laser micromachiningEmir Mutapcic; Pio Iovenitti; Jason P. Hayes20052005, vol.12, no.1-2
Bio-MEMS fabricated artificial capillaries for tissue engineeringG. J. Wang; C. L. Chen; S. H. Hsu; Y. L. Chiang20052005, vol.12, no.1-2
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