中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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2022 2023

2008, vol.14, no.1 2008, vol.14, no.12 2008, vol.14, no.2 2008, vol.14, no.3 2008, vol.14, no.4-5 2008, vol.14, no.6
2008, vol.14, no.7 2008, vol.14, no.8 2008, vol.14, no.9-11

题名作者出版年年卷期
Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technologyTakayuki Shibata; Yoichi Takahashi; Takahiro Kawashima; Toshio Kubota; Mamoru Mita; Takashi Mineta; Eiji Makino20082008, vol.14, no.9-11
High efficiency mixing by the use of cross-linked micro capillary fluid filterK. Fujiwara; Y. Ukita; M. Takeo; S. Negoro; T. Kanie; M. Katayama; Y. Utsumi20082008, vol.14, no.9-11
A Si stencil mask for deep X-ray lithography fabricated by MEMS technologyHarutaka Mekaru; Takayuki Takano; Yoshiaki Ukita; Yuichi Utsumi; Masaharu Takahashi20082008, vol.14, no.9-11
Proton beam writing: a platform technology for nanowire productionJ. A. van Kan; F. Zhang; S. Y. Chiam; T. Osipowicz; A. A. Bettiol; F. Watt20082008, vol.14, no.9-11
Effect of applying ultrasonic vibration in thermal nanoimprint lithographyHarutaka Mekaru; Toshihiko Noguchi; Hiroshi Goto; Masaharu Takahashi20082008, vol.14, no.9-11
Process parameter analysis in ablating micro-mold manufacturingJ. Fleischer; G. Halvadjiysky; S. Haupt20082008, vol.14, no.9-11
Effect of cobalt content on the work function of the electrodeposited nickel-cobalt filmsC. K. Chung; W. T. Chang; R. X. Zhou20082008, vol.14, no.9-11
Effect of baffle height and Reynolds number on fluid mixingC. K. Chung; C.-Y. Wu; T. R. Shih20082008, vol.14, no.9-11
Cylindrical coils created with 3D X-ray lithography and metallizationYoshifumi Matsumoto; Masaru Setomoto; Daiji Noda; Tadashi Hattori20082008, vol.14, no.9-11
High sensitive immunoassay for endocrine disrupting chemicals using antibody immobilized microcapillary bundle structureYuichi Utsumi; Toshifumi Asano; Yoshiaki Ukita; Katsuhiro Matsui; Masahiro Takeo; Seiji Negoro20082008, vol.14, no.9-11
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