中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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2004 2005 2006 2007 2008 2009
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2016 2017 2018 2019 2020 2021
2022 2023

2008, vol.14, no.1 2008, vol.14, no.12 2008, vol.14, no.2 2008, vol.14, no.3 2008, vol.14, no.4-5 2008, vol.14, no.6
2008, vol.14, no.7 2008, vol.14, no.8 2008, vol.14, no.9-11

题名作者出版年年卷期
Experimental characterization of electrostatically actuated in-plane bending of microcantileversA. Ballestra; E. Brusa; M. Gh. Munteanu; A. Soma20082008, vol.14, no.7
Design and fabrication of the suspended high-Q spiral inductors with X-beamsM. C. Hsieh; D. K. Jair; C. S. Lin20082008, vol.14, no.7
From MEMS devices to smart integrated systemsO. Soeraasen; J. E. Ramstad20082008, vol.14, no.7
Solving functional reliability issue for an optical electrostatic switchH. Camon; C. Ganibal; N. Rapahoz; M. Trzmiel; C. Pisella; C. Martinez; S. Valette20082008, vol.14, no.7
Usage of porous Al{sub}2O{sub}3 layers for RH sensingVeronika Timar-Horvath; Laszlo Juhasz; Andras Vass-Varnai; Gergely Perlaky20082008, vol.14, no.7
A two-step etching method to fabricate nanopores in siliconGou-Jen Wang; Wei-Zheng Chen; Kang J. Chang20082008, vol.14, no.7
Monotonic and fatigue testing of freestanding submicron thin beams application for MEMSMing-Tzer Lin; Chi-Jia Tong; Kai-Shiang Shiu20082008, vol.14, no.7
Silicon on nothing MEMS electromechanical resonatorCedric Durand; Fabrice Casset; Pascal Ancey; Fabienne Judong; Alexandre Talbot; Remi Quenouillere; Denis Renaud; Stephan Borel; Brigitte Florin; Lionel Buchaillot20082008, vol.14, no.7
New horizontal frustum optical waveguide fabrication using UV proximity printingTsung-Hung Lin; Hsiharng Yang; Ruey Fang Shyu; Ching-Kong Chao20082008, vol.14, no.7
Focussed ion beam based fabrication of micro-electro-mechanical resonatorsDaniel Grogg; Nicoleta Diana Badila-Ciressan; Adrian Mihai Ionescu20082008, vol.14, no.7
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