中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2006, vol.12, no.10-11 2006, vol.12, no.12 2006, vol.12, no.3 2006, vol.12, no.4 2006, vol.12, no.5 2006, vol.12, no.6
2006, vol.12, no.7 2006, vol.12, no.8 2006, vol.12, no.9

题名作者出版年年卷期
Fabrication and characterizations of a monolithic PZT microstageHegen Xu; Takahito Ono; De-Yuan Zhang Masayoshi Esashi20062006, vol.12, no.9
Mechanical punching of 15 μm size holeSang Min Yi; Byung Yun Joo; Min Soo Park; Chong Nam Chu; Soo-Ik Oh20062006, vol.12, no.9
Electroplating of micro-patterned tools via replication of silicone rubber formsJ. Lorenz; G. Schanz; N. Holstein; J. Konys20062006, vol.12, no.9
Adhesion and contact modeling and experiments in microelectromechanical systems including roughness effectsN. Tayebi; A. A. Polycarpou20062006, vol.12, no.9
Surface topography of planar PMMA grating structures produced by the UV-laser based phase mask methodC. Wochnowski; S. Metev; F. Vollertsen20062006, vol.12, no.9
Fabrication of high-aspect-ratio microscale mold inserts by parallelD. M. Cao; J. Jiang; R. Yang; W. J. Meng20062006, vol.12, no.9
Modeling, analysis and design of centrifugal force driven transient filling flow into rectangular microchannelDong Sung Kim; Tai Hun Kwon20062006, vol.12, no.9
Non-contact tape tension measurement and correlation of lateral tape motion and tape tension transientsBart Raeymaekers; Ryan J. Taylor; Frank E. Talke20062006, vol.12, no.9
Modeling product variations in hard disk drive micro-actuator suspensionsM. Rotunno; R. Oboe; R. A. de Callafon20062006, vol.12, no.9
Modeling and verification of the double frequency effect using a MEMS deviceJ. C. Chiou; Y. J. Lin20062006, vol.12, no.8
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