中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2006, vol.12, no.10-11 2006, vol.12, no.12 2006, vol.12, no.3 2006, vol.12, no.4 2006, vol.12, no.5 2006, vol.12, no.6
2006, vol.12, no.7 2006, vol.12, no.8 2006, vol.12, no.9

题名作者出版年年卷期
MEMS-based formaldehyde gas sensor integrated with a micro-hotplateChia-Yen Lee; Ping-Ru Hsieh; Che-Hsin Lin; Po-Cheng Chou; Lung-Ming Fu; Che-Ming Chiang20062006, vol.12, no.10-11
Triplex-pumping CD-like microfluidic platform with parabolic microchannelsG. J. Wang; C. H. Chang; H. Yang20062006, vol.12, no.10-11
New production method of convex microlens arrays for integrated fluorescence microfluidic detection systemsH. Yang; R. F. Shyu; J.-W. Huang20062006, vol.12, no.10-11
Micromachined silicon via-holes and interdigital bandpass filtersJian Zhu; Yuanwei Yu; Naibin Yang; Bailing Zhou; Yong Zhang20062006, vol.12, no.10-11
Fabrication of silicon-based two-dimensional photonic crystalsJian Zhu; Yong Zhang; Bailing Zhou; Jianfeng Gao; Shixing Jia20062006, vol.12, no.10-11
Fabrication process of a micro-inductor utilising a magnetic thin film coreD. Flynn; Nirmal Singh Sudan; A. Toon; M. P. Y. Desmulliez20062006, vol.12, no.10-11
Defect-free wet etching through pyrex glass using Cr/Au maskFrancis E. H. Tay; Ciprian Iliescu; Ji Jing; Jianmin Miao20062006, vol.12, no.10-11
Micro powder injection molding: process characterization and modelingRichard Heldele; Michael Schulz; David Kauzlaric; Jan G. Korvink; Jurgen Hausselt20062006, vol.12, no.10-11
Modeling and optimization of the hot embossing process for micro- and nanocomponent fabricationM. Worgull; J.-F. Hetu; K. K. Kabanemi; M. Heckele20062006, vol.12, no.10-11
Micro-electro-mechanical systems fast fabrication by selective thick polysilicon growth in epitaxial reactorO. De Sagazan; M. Denoual; P. Guil; D. Gaudin; O. Bonnaud20062006, vol.12, no.10-11
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