中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2005, vol.11, no.1 2005, vol.11, no.11 2005, vol.11, no.12 2005, vol.11, no.2-3 2005, vol.11, no.4-5 2005, vol.11, no.6
2005, vol.11, no.7 2005, vol.11, no.8-10 2005, vol.12, no.1-2

题名作者出版年年卷期
A simple micro-mixer prototyped in polycarbonateStephen Wan; Xu Diao; Zheng Hongyu; Ng Teng Yong20052005, vol.11, no.2-3
Casimir effect on the pull-in parameters of nanometer switchesW.-H. Lin; Y.-P. Zhao20052005, vol.11, no.2-3
High temperature resistant antireflective moth-eye structures for infrared radiation sensorsT. Glaser; A. Ihring; W. Morgenroth; N. Seifert; S. Schroter; V. Baier20052005, vol.11, no.2-3
Electrical detection of DNA hybridization with multilayer gold nanoparticles between nanogap electrodesC.-Y. Tsai; Y.-H. Tsai; C.-C. Pun; B. Chan; T.-Y. Luh; C.-C. Chen; F.-H. Ko; P.-J. Chen; P.-H. Chen20052005, vol.11, no.2-3
Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopyJ. Qian; T.-X. Yu; Y.-P. Zhao20052005, vol.11, no.2-3
Tuning the quality factor of bulk micromachined structures using squeezed-film dampingC.-C. Cheng; W. Fang20052005, vol.11, no.2-3
A novel tuning fork gyroscope with high Q-factors working at atmospheric pressureY. Chen; J. Jiao; B. Xiong; L. Che; X. Li; Y. Wang20052005, vol.11, no.2-3
A new pre-etching pattern to determine <110> crystallographic orientation on both (100) and (110) silicon wafersW.-H. Chang; Y.-C. Huang20052005, vol.11, no.2-3
Silicon MEMS components: a fatigue life assessment approachA. Varvani-Farahani20052005, vol.11, no.2-3
The evaporated metal masks for chemical glass etching for BioMEMSY. Mourzina; A. Steffen; A. Offenhausser20052005, vol.11, no.2-3
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