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期刊

ISSN	1057-7157
刊名	Journal of Microelectromechanical Systems
参考译名	微机电系统杂志
收藏年代	1998～2013

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2010	2011	2012	2013

2001, vol.10, no.1

2001, vol.10, no.2

2001, vol.10, no.3

2001, vol.10, no.4

题名

作者

出版年

年卷期

Surface micromachined polyimide scanning thermocouple probes

Mo-Huang Li; Julius J. Wu; Yogesh B. Ganchandani

2001

2001, vol.10, no.1

Micromachined electrodes for biopotential measurements

Patrick Griss; Peter Enoksson; Heli K. Tolvanen-Laakso; Pekka Merilainen; Stig ollmar; Goran Stemme

2001

2001, vol.10, no.1

Microstructure to substrate self-assembly using capillary forces

Uthara srinivasan; Dorian Liepmann; Roger T. Howe

2001

2001, vol.10, no.1

Batch transfer of LIGA Microstructures by selective electroplating and bonding

Li-Wei Pan; Liwei Lin

2001

2001, vol.10, no.1

A new organic modifier for anti-stiction

Bong Hwan Kin; Taek Dong Chung; Chang Hoon oh; Kukjin Chun

2001

2001, vol.10, no.1

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS; A comparison to the octadecyltrichlosilane self-assembled monolayer

W. Robert Ashurst; Christina Yau; Carlo Carraro; Roya Maboudian; Michael T. Dugger

2001

2001, vol.10, no.1

Silicon micromachining using in situ DC microplasmas

Chester G. Wilson; Yogesh B. Gianchandani

2001

2001, vol.10, no.1

Siliconn carbide micro-reaction-sintering using micromachined silicon molds

Shuji Tanaka; Shinya Sugimoto; Jing-Feng Li; Ryuzo Watanabe; Masayoshi Esashi

2001

2001, vol.10, no.1

Fabrication of high-aspect-ratio ceramic microstructures by injection molding with the altered lost mold technique

Ren-Haw Chen; Chin-Lung Lan

2001

2001, vol.10, no.1

A robust Co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS

Chen-Luen Shih; Bo-Kuai Lai; Harold Kahn; Stephen M. Phillips; Senior; Arthur H. Heuer

2001

2001, vol.10, no.1