中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2001, vol.10, no.1 2001, vol.10, no.2 2001, vol.10, no.3 2001, vol.10, no.4

题名作者出版年年卷期
Fabrication of multilayer systems combining microfluidic and microoptical elements for fluorescence detectionJean-Christophe Roulet; Reinhard Volkel; Hans Peter Herzig; Elisabeth Verpoorte; Nico F. de Rooij; Rene Dandliker20012001, vol.10, no.4
A one-chip scanning retina with an integrated micromechanical scanning actuatorKazunori Hoshino; Fabrizo Mura; Isao Shimoyama20012001, vol.10, no.4
S surface-micromachined resonant-beam pressure-sensing structurePatrik Melvas; Edvard Kalvesten; Goran Stemme20012001, vol.10, no.4
Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor arrayAndri Schaufelbuhl; N. Schneeberger; Ulrich Munch; Marc Waelti; Oliver Paul; Oliver Brand; Henry Baltes; Christian Menolfi; Qiuting Huang; Elko Doering; Markus Loepfe20012001, vol.10, no.4
Latching micromagnetic relaysMeichun Ruan; Jun Shen; Charles B. Wheeler20012001, vol.10, no.4
Design and fabrication of submicrometer, single crystal Si AccelerometerJason W. Weigold; Khalil Najafi; Stella W. Pang20012001, vol.10, no.4
Low-temperature wafer-level transfer bondingFrank Niklaus; Peter Enoksson; Patrick Griss; Edvard Kalvesten; Goran Stemme20012001, vol.10, no.4
Fabrication of ultrathin P{sup}(++) silicon microstructures using ion implantation and boron etch-stopChunchieh Huang; Khalil Najafi20012001, vol.10, no.4
Application of a parallel DSMC technique to predict flow characteristics of microfluidic filtersOzgur Aktas N. R. Aluru; Umberto Ravaioli20012001, vol.10, no.4
Microgimbal torsion beam design using open, thin-walled cross sectionsLilac Muller; Albert P. Pisano; Roger T. Howe20012001, vol.10, no.4
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