中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2001, vol.10, no.1 2001, vol.10, no.2 2001, vol.10, no.3 2001, vol.10, no.4

题名作者出版年年卷期
A HARPSS polysilicon vibrating ring gyroscopeFarrokh Ayazi; Khalil Najafi20012001, vol.10, no.2
Surface micromachined piezoelectric accelerometers (PiXLs)Don L. Devoe; Albert P. Pisano20012001, vol.10, no.2
A novel bulk-micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile displayLevent Yobas; Michael A. Huff; Frederick J. Lisy; Dominique M. Durand20012001, vol.10, no.2
A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackagesMehmet Dokmeci; Khalil Najafi20012001, vol.10, no.2
Linearization of electrostatically actuated surface micromachined 2-D optical scannerHiroshi Toshiyoshi; Wibool Piyawattanametha; Cheng-Ta Chan; Ming C. Wu20012001, vol.10, no.2
A ferrofluidic magnetic micropumpAnson Hatch; Andrew Evan Kamholz; Gary Holman; Paul Yager; Kalr F. Bohringer20012001, vol.10, no.2
A pin fin microheat sink for cooling macroscale conformal surfaces under the influence of thrust and frictional forcesLyndon S. Stephens; Kevin W. Kelly; Demetris Kountouris; Jeff Mclean20012001, vol.10, no.2
Miniaturization and integration of photoacoustic detection with a microfabricated chemical reactor systemSamara L. Firebaugh; Klavs; F. Jensen; Martin A. Schmidt20012001, vol.10, no.2
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezersCristina Rusu; Ronny van't Oever; Meint J. De Boer; Henri V. Jansen; J. W. (Erwin) Berenschot; Martin L. Bennink; Johannes S. Kanger; Bart G., de Grooth; Miko Elwenspoek; Jan Greve; Urgen Brugger; Albert van den Berg20012001, vol.10, no.2
Bent-beam electrothermal actuators-part I: Single beam and cascaded devicesLong Que; Jae-Sung Park; Yogesh B. Gianchandani20012001, vol.10, no.2
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