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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2004
2005
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2013
2004, vol.13, no.1
2004, vol.13, no.2
2004, vol.13, no.3
2004, vol.13, no.4
2004, vol.13, no.5
2004, vol.13, no.6
题名
作者
出版年
年卷期
Microplastic Lens Array Fabricated by a Hot Intrusion Process
Li-Wei Pan; Xinjiang Shen; Liwei Lin
2004
2004, vol.13, no.6
VHP Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators - Part II: Implementation and Characterization
Siavash Pourkamali; Zhili Hao; Farrokh Ayazi
2004
2004, vol.13, no.6
VHP Single-Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators - Part I: Design and Modeling
Zhili Hao; Siavash Pourkamali; Farrokh Ayazi
2004
2004, vol.13, no.6
The SiOG-Based Single-Crystalline Silicon (SCS) RF MEMS Switch With Uniform Characteristics
Jong-Man Kim; Jae-Hyoung Park; Chang-Wook Back; Yong-Kweon Kim
2004
2004, vol.13, no.6
Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators
Jian-Gang Guo; Ya-Pu Zhao
2004
2004, vol.13, no.6
Limit Cycle Oscillations in CW Laser-Driven NEMS
Keith Aubin; Maxim Zalalutdinov; Tuncay Alan; Robert B. Reichenbach; Richard Rand; Alan Zehnder; Jeevak Parpia; Harold Craighead
2004
2004, vol.13, no.6
Two-Axis Single-Crystal Silicon Micromirror Arrays
Mehmet R. Dokmeci; Ajay Pareek; Shivalik Bakshi; Marc Waelti; Clifford D. Fung; Khee Hang Heng; Carlos H. Mastrangelo
2004
2004, vol.13, no.6
Analog Piezoelectric-Driven Tunable Gratings With Nanometer Resolution
Chee Wei Wong; Yongbae Jeon; George Barbastathis; Sang-Gook Kim
2004
2004, vol.13, no.6
Tilt-Angle Stabilization of Electrostatically Actuated Micromechanical Mirrors Beyond the Pull-In Point
Jinghong Chen; Wendelin Weingartner; Alexi Azarov; Randy C. Giles
2004
2004, vol.13, no.6
Electrical Contact Resistance as a Diagnostic Tool for MEMS Contact Interfaces
Ari Lumbantobing; Lior Kogut; Kyriakos Komvopoulos
2004
2004, vol.13, no.6
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