中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2004, vol.13, no.1 2004, vol.13, no.2 2004, vol.13, no.3 2004, vol.13, no.4 2004, vol.13, no.5 2004, vol.13, no.6

题名作者出版年年卷期
A Sweeping Mode Integrated Fingerprint Sensor With 256 Tactile MicrobeamsBenoit Chariot; Fabien Parrain; Nicolas Galy; Skandar Basrour; Bernard Courtois20042004, vol.13, no.4
Nonlinear Dynamic Characteristics of Piezoelectric Bending Actuators Under Strong Applied Electric FieldL. Q. Yao; J. G. Zhang; L. Lu; M. O. Lai20042004, vol.13, no.4
Zirconium Tungstate (ZrW{sub}2O{sub}8)-Based Micromachined Negative Thermal-Expansion Thin FilmsMichael S. Sutton; Joseph Talghader20042004, vol.13, no.4
Pulsed-Laser Annealing, a Low-Thermal-Budget Technique for Eliminating Stress Gradient in Poly-SiGe MEMS StructuresSherif Sedky; Roger T. Howe; Tsu-Jae King20042004, vol.13, no.4
Recovery of Stiction-Failed MEMS Structures Using Laser-Induced Stress WavesVijay Gupta; Richard Snow; Ming C. Wu; Amit Jain; Jui-che Tsai20042004, vol.13, no.4
Development of Si-SiC Hybrid Structures for Elevated Temperature Micro-TurbomachineryHyung-Soo Moon; Dongwon Choi; S. Mark Spearing20042004, vol.13, no.4
An Improved Reynolds-Equation Model for Gas Damping of Microbeam MotionMichael A. Gallis; John R. Torczynski20042004, vol.13, no.4
Hybrid Nanotransport System by Biomolecular Linear MotorsRyuji Yokokawa; Shoji Takeuchi; Takahide Kon; Masaya Nishiura; Reiko Ohkura; Masaki Edamatsu; Kazuo Sutoh; Hiroyuki Fujita20042004, vol.13, no.4
An In-Plane High-Sensitivity, Low-Noise Micro-g Silicon Accelerometer With CMOS Readout CircuitryJunseok Chae; Haluk Kulah; Khalil Najafi20042004, vol.13, no.4
A Method for Precision Patterning of Silicone Elastomer and Its ApplicationsKee Suk Ryu; Xuefeng Wang; Kashan Shaikh; Chang Liu20042004, vol.13, no.4
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