中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998~2013



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2004 2005 2006 2007 2008 2009
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2004, vol.13, no.1 2004, vol.13, no.2 2004, vol.13, no.3 2004, vol.13, no.4 2004, vol.13, no.5 2004, vol.13, no.6

题名作者出版年年卷期
Design of a Temperature-Stable RF MEM CapacitorHeikki Nieminen; Vladimir Ermolov; Samuli Silanto; Kjell Nybergh; Tapani Ryhanen20042004, vol.13, no.5
Nonlinear Limits for Single-Crystal Silicon MicroresonatorsVille Kaajakari; Tomi Mattila; Aarne Oja; Heikki Seppa20042004, vol.13, no.5
Nonlinear Dynamic Study of a Bistable MEMS: Model and ExperimentMarc Sulfridge; Taher Saif; Norman Miller; Mark Meinhart20042004, vol.13, no.5
Reducing Brownian Motion in an Electrostatically Tunable MEMS LaserDan Huber; Paul Corredoura; Steve Lester; Virginia Robbins; Linda Kamas20042004, vol.13, no.5
Full-Lagrangian Schemes for Dynamic Analysis of Electrostatic MEMSSudipto K. De; N. R. Aluru20042004, vol.13, no.5
Position Control of Parallel-Plate Microactuators for Probe-Based Data StorageMichael S.-C. Lu; Gary K. Fedder20042004, vol.13, no.5
Micromechanical Digital-to-Analog Converter for Out-of-Plane MotionGuangya Zhou; E. H. Tay; Fook Siong Chau20042004, vol.13, no.5
A Chaotic Mixer for Magnetic Bead-Based Micro Cell SorterHiroaki Suzuki; Chih-Ming Ho; Nobuhide Kasagi20042004, vol.13, no.5
Electroplated Metal Microstructures Embedded in Fusion-Bonded Silicon: Conductors and Magnetic MaterialsDavid P. Arnold; Mica Zana; David R. Veazie; Mark G. Allen20042004, vol.13, no.5
Leak-Tight Piezoelectric Microvalve for High-Pressure Gas MicropropulsionEui-Hyeok (EH) Yang; Choonsup Lee; Juergen Mueller; Thomas George20042004, vol.13, no.5
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