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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2004
2005
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2013
2004, vol.13, no.1
2004, vol.13, no.2
2004, vol.13, no.3
2004, vol.13, no.4
2004, vol.13, no.5
2004, vol.13, no.6
题名
作者
出版年
年卷期
Design of a Temperature-Stable RF MEM Capacitor
Heikki Nieminen; Vladimir Ermolov; Samuli Silanto; Kjell Nybergh; Tapani Ryhanen
2004
2004, vol.13, no.5
Nonlinear Limits for Single-Crystal Silicon Microresonators
Ville Kaajakari; Tomi Mattila; Aarne Oja; Heikki Seppa
2004
2004, vol.13, no.5
Nonlinear Dynamic Study of a Bistable MEMS: Model and Experiment
Marc Sulfridge; Taher Saif; Norman Miller; Mark Meinhart
2004
2004, vol.13, no.5
Reducing Brownian Motion in an Electrostatically Tunable MEMS Laser
Dan Huber; Paul Corredoura; Steve Lester; Virginia Robbins; Linda Kamas
2004
2004, vol.13, no.5
Full-Lagrangian Schemes for Dynamic Analysis of Electrostatic MEMS
Sudipto K. De; N. R. Aluru
2004
2004, vol.13, no.5
Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage
Michael S.-C. Lu; Gary K. Fedder
2004
2004, vol.13, no.5
Micromechanical Digital-to-Analog Converter for Out-of-Plane Motion
Guangya Zhou; E. H. Tay; Fook Siong Chau
2004
2004, vol.13, no.5
A Chaotic Mixer for Magnetic Bead-Based Micro Cell Sorter
Hiroaki Suzuki; Chih-Ming Ho; Nobuhide Kasagi
2004
2004, vol.13, no.5
Electroplated Metal Microstructures Embedded in Fusion-Bonded Silicon: Conductors and Magnetic Materials
David P. Arnold; Mica Zana; David R. Veazie; Mark G. Allen
2004
2004, vol.13, no.5
Leak-Tight Piezoelectric Microvalve for High-Pressure Gas Micropropulsion
Eui-Hyeok (EH) Yang; Choonsup Lee; Juergen Mueller; Thomas George
2004
2004, vol.13, no.5
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