中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2004, vol.13, no.1 2004, vol.13, no.2 2004, vol.13, no.3 2004, vol.13, no.4 2004, vol.13, no.5 2004, vol.13, no.6

题名作者出版年年卷期
Photoresist Coating Methods for the Integration of Novel 3-D RF MicrostructuresNga Phuong Pham; E. Boellaard; Joachim N. Burghartz; Pasqualina M. Sarro20042004, vol.13, no.3
Shape-Memory Polymers for Microelectromechanical SystemsKen Gall; Paul Kreiner; David Turner; Michael Hulse20042004, vol.13, no.3
A Novel Method of Fabricating Integrated FETs for MEMS ApplicationsBruce L. Draper; Murat Okandan; Seethambal S. Mani; R. S. Bennett20042004, vol.13, no.3
An Optically Powered Wireless Telemetry Module for High-Temperature MEMS Sensing and CommunicationMichael Suster; Wen H. Ko; Damn J. Young20042004, vol.13, no.3
Fabrication and Characterization of a Nanowire/Polymer-Based Nanocomposite for a Prototype Thermoelectric DeviceAlexis R. Abramson; Woo Chul Kim; Scott T. Huxtable; Haoquan Yan; Yiying Wu; Arun Majumdar; Chang-Lin Tien; Peidong Yan20042004, vol.13, no.3
Ka-Band Distributed MEMS Phase Shifters on Silicon Using AISi Suspended MembraneJian Qing; Yanling Shi; Wei Li; Zongsheng Lai; Ziqiang Zhu; Peisheng Xin20042004, vol.13, no.3
Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching ApplicationsJonathan J. Bernstein; William P. Taylor; John D. Brazzle; Christopher J. Corcoran; Gregory Kirkos; Jefferson E. Odhner; Ajay Pareek; Marc Waelti; Marvin Zai20042004, vol.13, no.3
An Additive Micromolding Approach for the Development of Micromachined Ceramic Substrates for RF ApplicationsKunal Vaed; John Florkey; Sheikh A. Akbar; Marc J. Madou; John J. Lannutti; Sean S. Cahill20042004, vol.13, no.3
Parylene Surface-Micromachined Membranes for Sensor ApplicationsZhifang Fan; Jonathan M. Engel; Jack Chen; Chang Liu20042004, vol.13, no.3
Angular Vertical Comb-Driven Tunable Capacitor With High-Tuning CapabilitiesHung D. Nguyen; Dooyoung Hah; Pamela R. Patterson; Rumin Chao; Wibool Piyawattanametha; Erwin K. Lau; Ming C. Wu20042004, vol.13, no.3
12



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024