中国机械工程学会生产工程分会知识服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2004, vol.13, no.1 2004, vol.13, no.2 2004, vol.13, no.3 2004, vol.13, no.4 2004, vol.13, no.5 2004, vol.13, no.6

题名作者出版年年卷期
A Curved-Beam Bistable MechanismJin Qiu; Jeffrey H. Lang; Alexander H. Slocum20042004, vol.13, no.2
A Low-Temperature Thin-Film Electroplated Metal Vacuum PackageBrian H. Stark; Khalil Najafi20042004, vol.13, no.2
Microassembly of 3-D Microstructures Using a Compliant, Passive MicrogripperNikolai Dechev; William L. Cleghorn; James K. Mills20042004, vol.13, no.2
A Micromachined 2×2 Optical Switch Aligned With Bevel-Ended Fibers for Low Return LossHo Nam Kwon; Jong-Hyun Lee20042004, vol.13, no.2
MEMS Tilt-Mirror Spatial Light Modulator for a Dynamic Spectral EqualizerJonathan J. Bernstein; Mehmet R. Dokmeci; Gregory Kirkos; Amy Bowman Osenar; John Peanasky; Ajay Pareek20042004, vol.13, no.2
Application of a Multilayered Magnetostrictive Film to a Micromachined 2-D Optical ScannerAlexis Debray; Alfred Ludwig; Tank Bourouina; Akira Asaoka; Nicholas Tiercelin; Gilbert Reyne; Takahiko Oki; Eckhard Quandt; Hideo Muro; Hiroyuki Fujita20042004, vol.13, no.2
High-Fidelity Modeling of MEMS Resonators-Part II: Coupled Beam-Substrate Dynamics and ValidationYong-Hwa Park; K. C. Park20042004, vol.13, no.2
Anelasticity and Damping of Thin Aluminum Films on Silicon SubstratesDae-han Choi; Hyungsub Kim; William D. Nix20042004, vol.13, no.2
High-Fidelity Modeling of MEMS Resonators-Part I: Anchor Loss Mechanisms Through SubstrateYong-Hwa Park; K. C. Park20042004, vol.13, no.2
The MEMSNAS Process: Microloading Effect for Micromachining 3-D Structures of Nearly All ShapesTarik Bourouina; Takahisa Masuzawa; Hiroyuki Fujita20042004, vol.13, no.2
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