中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

1998, vol.4, no.2 1998, vol.4, no.3 1998, vol.4, no.4 1998, vol.5, no.1 1998, vol.5, no.2

题名作者出版年年卷期
A new method for mass fabrication of metallic microstructuresA. Thies; V. Piotter; J. H. Hausselt; O. F. Hagena19981998, vol.4, no.3
Angular rate sensor and accelerometer combined on the same micromachined CMOS chipD. R. Sparks; X. Huang; W. Higdon; J. D. Johnson19981998, vol.4, no.3
Comparative study of hot embossed micro structures fabricated by laboratory and commercial environmentsL. Lin; Y. T. Cheng; C. J. Chiu19981998, vol.4, no.3
Fabrication of LIGA mold insertsW. Bacher; K. Bade; B. Matthis; M. Saumer; R. Schwarz19981998, vol.4, no.3
Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resistH. Lorenz; M. Despont; P. Vettiger; P. Renaud19981998, vol.4, no.3
Heat exchange in short microtubes and micro heat exchangers with low hydraulic lossesD. A. Rachkovskij; E. M. Kussul; S. A. Talayev19981998, vol.4, no.3
High aspect ratio micromachining by synchrotron radiation direct photo-etchingT. Katoh; Y. Zhang19981998, vol.4, no.3
Hot embossing: the molding technique for plastic microstructuresM. Heckele; W. Bacher; K. D. Muller19981998, vol.4, no.3
LIGA-technology for the fabrication of positioned planar structuresH. Schift; J. Sochtig19981998, vol.4, no.3
Multi-functional valve components fabricated by combination of LIGA processes and high precision mechanical engineeringA. Ruzzu; J. Fahrenberg; M. Heckele; Th. Schaller19981998, vol.4, no.3
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