中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

1998, vol.4, no.2 1998, vol.4, no.3 1998, vol.4, no.4 1998, vol.5, no.1 1998, vol.5, no.2

题名作者出版年年卷期
Actuator - sensor technology on "electronic grade" diamond filmsP. Gluche; R. Leuner; A. Vescan; W. Ebert; E. Kohn; C. Rembe; S. aus der Wiesche; E. P. Hofer19981998, vol.5, no.1
Application of the laser flash diffusivity method to thin high thermal conductivity materialsL. Kehoe; P. V. Kelly; G. M. Crean19981998, vol.5, no.1
Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluationK. Komai; K. Minoshima; S. Inoue19981998, vol.5, no.1
Mechanical stress measurements using micro-Raman spectroscopyI. De Wolf; H. E. Maes19981998, vol.5, no.1
Polymer materials for microsystem technologiesR. Ruprecht; T. Hanemann; V. Piotter; J. Hausselt19981998, vol.5, no.1
Reduction of mechanical stress in micromachined components caused by humidity-induced volume expansion of polymer layersR. Buchold; A. Nakladal; G. Gerlach; K. Sahre; K. -J. Eichhorn; M. Muller19981998, vol.5, no.1
Torsional tests on microstructures: two methods to determine shear-moduliG. Schiltges; D. Gsell; J. Dual19981998, vol.5, no.1
Transducer and protective PVD-films for applications in microsystem componentsE. Quandt; H. Holleck19981998, vol.5, no.1



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