中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2002, vol.8, no.1 2002, vol.8, no.2-3 2002, vol.8, no.4-5 2002, vol.8, no.6 2002, vol.9, no.1-2

题名作者出版年年卷期
Recent developments in dimensional metrology for microsystem componentsS. Cao; U. Brand; T. Kleine-Besten; W. Hoffmann; H. Schwenke; S. Butefisch; S. Buttgenbach20022002, vol.8, no.1
High aspect ratio Microstructures based on anisotropic porous materialsF. Muller; A. Birner; J. Schilling; A. -P. Li; K. Nielsch; U. Gosele; V. Lehmann20022002, vol.8, no.1
The evolution of load/unload technologyM. Suk; T. R. Albrecht20022002, vol.8, no.1
Numerical simulation of a polysilicon thermal flexure actuatorY. Kuang; Q. -A. Huang; N. K. S. Lee20022002, vol.8, no.1
Ramp unloading "footprints"J. R. Yaeger; B. Hiller20022002, vol.8, no.1
Downscaling of grippers for micro assemblyH. Grutzeck; L. Kiesewetter20022002, vol.8, no.1
Polymer microfabrication technologiesO. Rotting; W. Ropke; H. Becker; C. Gartner20022002, vol.8, no.1
Impact rebound type inertia latch for load/unload technologyY. Byun; J. Kang; J. Chang; V. Sharma; H. J. Lee20022002, vol.8, no.1
Ramp loading "sweet spots"J. R. Yaeger; B. Hiller20022002, vol.8, no.1
An electro-thermally driven microactuator with two dimensional motionC. -T. Wu; W. Hsu20022002, vol.8, no.1
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