中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2002, vol.8, no.1 2002, vol.8, no.2-3 2002, vol.8, no.4-5 2002, vol.8, no.6 2002, vol.9, no.1-2

题名作者出版年年卷期
Study on three-dimensional micromachining using synchrotron radiation etchingN. Nishi; T. Katoh; H. Ueno; S. Sugiyama20022002, vol.9, no.1-2
Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technologyK. Kim; S. Park; J. -B. Lee; H. Manohara; Y. Desta; M. Murphy; C. H. Ahn20022002, vol.9, no.1-2
Effects of aperture size and pressure on XeF{sub}2 etching of siliconK. Sugano; O. Tabata20022002, vol.9, no.1-2
Thick-film lithography using laser writeY. Cheng; T. Huang; C. -C. Chieng20022002, vol.9, no.1-2
High performance flat miniature heat pipes fabricated by UD-LIGA processY. Cheng; P. P. Ding; T. S. Sheu; B. Y. Shew; P. H. Chen20022002, vol.9, no.1-2
Improvement of dynamic characteristics for optical pickup actuator using sensitivity analysisK. -T. Lee; D. -J. Lee; N. -C. Park; Y. -P. Park20022002, vol.9, no.1-2
Development of an efficient page-turning mechanism for automated teller machinesA. Mochizuki; S. Noro; G. Sato; T. Nakata; K. Kokubo; K. Sasaki20022002, vol.9, no.1-2
Quasi-3D microstructure fabrication technique utilizing hard X-ray lithography for synchrontron radiationH. Mekaru; Y. Utsumi; T. Hattori20022002, vol.9, no.1-2
Vibration analysis of a contact slider/gimbal of a flexible disk driveY. Muraoka; H. Ryoson; T. Kawashima; M. Kondo; Y. Kaneta; Y. Okazaki20022002, vol.9, no.1-2
Lubricant bonding, chemical structure, and additive effects on tribological performances at head-disk interfacesZ. Zhao; E. R. Karazic; Q. Zhao; M. J. Embree; P. H. Trinh; T. Lam20022002, vol.9, no.1-2
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