中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2015, vol.21, no.1 2015, vol.21, no.10 2015, vol.21, no.11 2015, vol.21, no.12 2015, vol.21, no.2 2015, vol.21, no.3
2015, vol.21, no.4 2015, vol.21, no.5 2015, vol.21, no.6 2015, vol.21, no.7 2015, vol.21, no.8 2015, vol.21, no.9

题名作者出版年年卷期
A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 degrees CMarsi, Noraini; Majlis, Burhanuddin Yeop; Hamzah, Azrul Azlan; Mohd-Yasin, Faisal20152015, vol.21, no.1
Design and characterization of miniature fluid dynamic bearing using novel multi-step elliptical groovesChen, Chien-Yu; Liu, Chien-Sheng; Li, Yu-Cheng20152015, vol.21, no.1
Recent progress in low temperature nanoimprint lithographySun, Hongwen20152015, vol.21, no.1
Experimental study of a low-g micromachined electrostatically suspended accelerometer for space applicationsMa, G. Y.; Han, F. T.; You, P. C.; Zhang, L.; Yan, X. J.20152015, vol.21, no.1
Development of a simple and reliable PDMS interconnect for high throughput microfluidic applicationsZhang, Z. Y.; Mu, C. J.; Lin, M.; Cao, X. C.20152015, vol.21, no.1
High temperature characteristic for wireless pressure LTCC-based sensorTan Qiulin; Kang Hao; Qin Li; Xiong Jijun; Liu Jun; Xue Chenyang; Zhang Wendong; Luo Tao20152015, vol.21, no.1
Application of vertically aligned carbon nanotubes on burnishing slider in cleaning process of magnetic disk surfacesTani, Hiroshi; Konishi, Keisuke; Norimatsu, Wataru; Kusunoki, Michiko; Tagawa, Norio20152015, vol.21, no.1
A near zero skew actuation mechanism for hard disk drivesHe, Zhimin; Mou, Jianqiang; Chan, Kheong Sann; Lam, Suet Hoi; Lin, Wuzhong20152015, vol.21, no.1
Optimal design of piezoelectric micromachined modal gyroscope (PMMG) with modes matched: modal analysisWu, Xiaosheng; Chen, Wenyuan; Reza, Abdolvand20152015, vol.21, no.1
Integration method of silicon sensors on SU-8-based microfluidic platformsPerdigones, Francisco; Aracil, Carmen; Quero, Jose M.; Gutierrez, Manuel; Jimenez, Cecilia; Gimenez, Pablo20152015, vol.21, no.1
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