中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2009, vol.15, no.1 2009, vol.15, no.10/11 2009, vol.15, no.12 2009, vol.15, no.2 2009, vol.15, no.3 2009, vol.15, no.4
2009, vol.15, no.5 2009, vol.15, no.6 2009, vol.15, no.7 2009, vol.15, no.8 2009, vol.15, no.9

题名作者出版年年卷期
Magnetic actuator design for single-axis micro-gyroscopesNan-Chyuan Tsai; Wei-Ming Huang; Chao-Wen Chiang20092009, vol.15, no.4
Uniformity study of nickel thin-film microstructure deposited by electroplatingJia-dong Li; Ping Zhang; Yi-hui Wu; Yong-shun Liu; Ming Xuan20092009, vol.15, no.4
Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometerA. Ravi Sankar; S. Das; S. K. Lahiri20092009, vol.15, no.4
Fabrication of high-aspect-ratio electrode array by combining UV-LIGA with micro electro-discharge machiningYang-Yang Hu; D. Zhu; N. S. Qu; Y. B. Zeng; P. M. Ming20092009, vol.15, no.4
Analysis of application patterns of Z-type MEMS microspringHua Li; Shi Gengchen20092009, vol.15, no.4
Dynamic response of a torsional micromirror to electrostatic force and mechanical shockFaraz Khatami; Ghader Rezazadeh20092009, vol.15, no.4
Surface micromachined on-chip transformer fabricated on glass substrateJumril Yunas; Azrul Azlan Hamzah; Burhanuddin Yeop Majlis20092009, vol.15, no.4
A new way of information storage using red, green, blue and black color imprintsVamsi Talla; Rahul Sangwan; Arun Chattopadhyay20092009, vol.15, no.4
Design and fabrication of a micro Alvarez lens array with a variable focal lengthChunning Huang; Lei Li; Allen Y. Yi20092009, vol.15, no.4
An experimental and numerical investigation into the effects of the PZT actuator shape in polymethylmethacrylate (PMMA) peristaltic micropumpsYi-Chu Hsu; Jia-Long Hsu; Ngoc Bich Le20092009, vol.15, no.4
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