中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2009, vol.15, no.1 2009, vol.15, no.10/11 2009, vol.15, no.12 2009, vol.15, no.2 2009, vol.15, no.3 2009, vol.15, no.4
2009, vol.15, no.5 2009, vol.15, no.6 2009, vol.15, no.7 2009, vol.15, no.8 2009, vol.15, no.9

题名作者出版年年卷期
Lifetime modelling for microsystems integration: from nano to systemsBernhard Wunderle; B. Michel20092009, vol.15, no.6
Application of hybrid differential transformation/finite difference method to nonlinear analysis of micro fixed-fixed beamCha'o-Kuang Chen; H. Y. Lai; Chin-Chia Liu20092009, vol.15, no.6
Switching cell embedded in photonic crystalAlmir Wirth Lima, Jr.; A. S. B. Sombra20092009, vol.15, no.6
Experimental analysis and numerical modelling of the forming process of polypropylene replicas of micro-cavities using hot embossingMohamed Sahli; Christine Millot; Claude Roques-Carmes; Chantal Khan Malek20092009, vol.15, no.6
Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman methodShuo Huang; Xiaodong Ruan; Jun Zou; Xin Fu; Huayong Yang20092009, vol.15, no.6
The optimization of hybrid scaffold fabrication process in precision deposition system using design of experimentsJong Young Kim; Dong-Woo Cho20092009, vol.15, no.6
Electromechanical characterization of a new micro programmable blazed grating by laser Doppler vibrometryYi-Ting Yu; Wei-Zheng Yuan; Da-Yong Qiao20092009, vol.15, no.6
Micromanipulation system using scanning electron microscopeY. Nakazato; T. Yuasa; G. Sekine; H. Miyazawa; M. Jin; S. Takeuchi; Y. Ariga; M. Murakawa20092009, vol.15, no.6
A PZT-driven atomizer based on a vibrating flexible membrane and a micro-machined trumpet-shaped nozzle arrayYeau-Ren Jeng; Chien-Chan Su; Guo-Hua Feng; Yu-Yin Peng; Ghin-Pin Chien20092009, vol.15, no.6
Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipationWen-Teng Chang; Christian Zorman20092009, vol.15, no.6
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