中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2009, vol.15, no.1 2009, vol.15, no.10/11 2009, vol.15, no.12 2009, vol.15, no.2 2009, vol.15, no.3 2009, vol.15, no.4
2009, vol.15, no.5 2009, vol.15, no.6 2009, vol.15, no.7 2009, vol.15, no.8 2009, vol.15, no.9

题名作者出版年年卷期
Analysis of pattern height development in hot embossing processYong He; Jian-Zhong Fu; Zi-Chen Chen20092009, vol.15, no.7
MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coilsChong Lei; Ren Wang; Yong Zhou; Zhimin Zhou20092009, vol.15, no.7
Resonant frequency sensitive MEMS bandpass filter using capacitive sensing schemeIn-Hyouk Song; Yves-Alain Peter; Michel Meunier20092009, vol.15, no.7
Single-wafer die-level fusion bonding process for multi-layer devicesHaifeng Dong20092009, vol.15, no.7
A nodal analysis method for electromechanical behavior simulation of bow-tie shaped microbeamsMin Li; Qing-An Huang; Wei-Hua Li20092009, vol.15, no.7
A study of PZT valveless micropump with asymmetric obstaclesChing-Jiun Lee; Horn-Jiunn Sheen; Zhi-Kai Tu; U. Lei; Cheng-Ying Yang20092009, vol.15, no.7
A miniature spindle motor with fluid dynamic bearings for portable storage device applicationsChien-Sheng Liu; Psang-Dain Lin; Meng-Che Tsai20092009, vol.15, no.7
Design of a relaying electroosmosis pump driven by low-voltage DCQiuquan Guo; Yu Liu; Xueyin Wu; Jun Yang20092009, vol.15, no.7
A novel active vibration isolator applied for micro-gyro by array of deposited electrodesNan-Chyuan Tsai; Chung-Yang Sue; Bing-Hong Liou20092009, vol.15, no.7
Fabrication and characterization of a polymethyl methacrylate continuous-flow PCR microfluidic chip using CO{sub}2 laser ablationHeng Qi; Xiansong Wang; Tao Chen; Xuemei Ma; Tiechuan Zuo20092009, vol.15, no.7
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