中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2013, vol.31, no.1 2013, vol.31, no.2

题名作者出版年年卷期
Simple Si(111) surface preparation by thin wafer cleavageWilliam Paul; Yoichi Miyahara; Peter H. Grutter20132013, vol.31, no.2
Effects of substrate doping on Gd_2O_3(100)/Si(100) heterostructureWattaka Sitaputra; Raphael Tsu20132013, vol.31, no.2
Relative lability of gold-oxide thin films in contact with air, solvents, or electrolyte solutionsKevin M. Cook; Gregory S. Ferguson20132013, vol.31, no.2
On the change of preferential growth orientation in chemical vapor deposition of titanium carbide by aromatic hydrocarbon precursorsHenrik Pedersen; Ching-Chi Lin; Lars Ojamae20132013, vol.31, no.2
Characterization of metal oxide layers grown on CVD grapheneAkitomo Matsubayashi; Joseph Abel; Dhiraj Prasad Sinha; Ji Ung Lee; Vincent P. LaBella20132013, vol.31, no.2
Three dimensional reciprocal space measurement by x-ray diffraction using linear and area detectors: Applications to texture and defects determination in oriented thin films and nanoprecipitatesSimon Gaudet; Koen De Keyser; Samuel Lambert-Milot; Jean Jordan-Sweet; Christophe Detavernier; Christian Lavoie; Patrick Desjardins20132013, vol.31, no.2
Growth and structure of ZnO thin films on polar (√3 × √3)R30° reconstructed and unreconstructed MgO(111) surfaces by atomic layer depositionKallol Pradhan; Paul F. Lyman20132013, vol.31, no.2
Atomic layer deposition of TiN for the fabrication of nanomechanical resonatorsNathan Nelson-Fitzpatrick; Csaba Guthy; Somayyeh Poshtiban; Eric Finley; Kenneth D. Harris; Brian J. Worfolk; Stephane Evoy20132013, vol.31, no.2
Structural, surface, and thermomechanical properties of intrinsic and argon implanted tetrahedral amorphous carbonEdison F. Motta; Gustavo A. Viana; Douglas S. Silva; Andresa D. S. Cortes; Fernando L. Freire; Francisco C. Marques20132013, vol.31, no.2
Modulation of Ni valence in p-type NiO films via substitution of Ni by CuWei-Yu Chen; Jiann-Shing Jeng; Kuo-Lun Huang; Jen-Sue Chen20132013, vol.31, no.2
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