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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2011, vol.29, no.1 2011, vol.29, no.2 2011, vol.29, no.3 2011, vol.29, no.4 2011, vol.29, no.5 2011, vol.29, no.6

题名作者出版年年卷期
Properties of double-layered Ga-doped Al-zinc-oxide/titanium-doped indium-tin-oxide thin films prepared by dc magnetron sputtering applied for Si-based thin film solar cellsChao-Chun Wang; Dong-Sing Wuu; Yang-Shih Lin; Shui-Yang Lien; Yung-Chuan Huang; Chueh-Yang Liu; Chia-Fu Chen; Asheesh Nautiyal; Shuo-Jen Lee20112011, vol.29, no.6
Etching characteristics and mechanisms of SiC thin films in inductively-coupled HBr-Ar, N_2, O_2 plasmasAlexander Efremov; Sungchil Kang; Kwang-Ho Kwon; Won Seok Choi20112011, vol.29, no.6
Electrical and material characterizations of HfTiO_4 flash memory devices with post-annealingChyuan-Haur Kao; Hsiang Chen; Hun Wei Chang; Chih Sheng Chuang20112011, vol.29, no.6
Improvements to bit line contact processing in trench DRAMChyuan-Haur Kao; Hsiang Chen; Yi-Chen Chen; Yao-Min Chiu; Shiao-Ge Tsai; Hong-Kai Lo; Yun-Ru Chen20112011, vol.29, no.6
Design of steady-state isothermal gas distribution systems consisting of long tubes in the whole range of the Knudsen numberSerafeim Misdanitis; Dimitris Valougeorgis20112011, vol.29, no.6
Method to compensate radiation-induced errors in a hot-cathode-ionization gauge with correcting electrodeHiroshi Saeki; Tamotsu Magome20112011, vol.29, no.6
Dielectric performance of hybrid alumina-silicone nanolaminates synthesized by plasma enhanced chemical vapor depositionRakhi P. Patel; David Chiavetta; Colin A. Wolden20112011, vol.29, no.6
Zirconium nitride films deposited in (Ar + N_2 + H_2) sputtering atmosphere: Optical, structural, and electrical propertiesM. A. Signore; D. Valerini; L. Tapfer; G. Caretto; A. Rizzo20112011, vol.29, no.6
Optical emission characteristics of medium- to high-pressure N_2 dielectric barrier discharge plasmas during surface modification of polymersDongping Liu; Jinhai Niu; Naisen Yu20112011, vol.29, no.6
Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substratesMarco Natali; Denis Garoli; Valentino Rigato; Filippo Romanato20112011, vol.29, no.6
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