中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2011, vol.29, no.1 2011, vol.29, no.2 2011, vol.29, no.3 2011, vol.29, no.4 2011, vol.29, no.5 2011, vol.29, no.6

题名作者出版年年卷期
Status and potential of atmospheric plasma processing of materialsDaphne Pappas20112011, vol.29, no.2
Physical vapor deposition and patterning of calcium fluoride filmsL. Pinol; K. Rebello; K. Caruso; A. S. Francomacaro; G. L. Coles20112011, vol.29, no.2
High-corrosion-resistant Al_2O_3 passivation-film formation by selective oxidation on austenitic stainless steel containing AlMasafumi Kitano; Hidekazu Ishii; Yasuyuki Shirai; Tadahiro Ohmi20112011, vol.29, no.2
MIAMI: Microscope and ion accelerator for materials investigationsJ. A. Hinks; J. A. van den Berg; S. E. Donnelly20112011, vol.29, no.2
Spectroscopic ellipsometry and X-ray photoelectron spectroscopy of La_2O_3 thin films deposited by reactive magnetron sputteringV. V. Atuchin; A. V. Kalinkin; V. A. Kochubey; V. N. Kruchinin; R. S. Vemuri; C. V. Ramana20112011, vol.29, no.2
Experimental evaluation of an adaptive Joule-Thomson cooling system including silicon-microfabricated heat exchanger and microvalve componentsWeibin Zhu; Jong M. Park; Michael J. White; Gregory F. Nellis; Yogesh B. Gianchandani20112011, vol.29, no.2
Formation of Pd nanocrystals in titanium-oxide film by rapid thermal annealing of reactively cosputtered TiPdO filmsWan-Yi Huang; Shi-Jin Ding; Hong-Bing Chen; Qing-Qing Sun; David Wei Zhang20112011, vol.29, no.2
Surface activated bonding of copper through silicon vias and gold stud bumps at room temperatureM. M. R. Howlader; F. Zhang; M. J. Deen; T. Suga; A. Yamauchi20112011, vol.29, no.2
Confirmation of sample quality: X-ray and ultraviolet photoelectron spectroscopies of uranium dioxideS.-W. Yu; J. G. Tobin20112011, vol.29, no.2
High rate deep Si etching for through-silicon via applicationsItsuko Sakai; Noriko Sakurai; Tokuhisa Ohiwa20112011, vol.29, no.2
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